| Presentation | 2007-08-09 Characteristics of Mg-Ni thin films deposited by sputtering method Takashi AIKOH, Daisaku NAGAHAMA, Makoto HIRATA, Hidehiko SHIMIZU, Takeo MARUYAMA, Haruo IWANO, Takahiro KAWAKAMI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Ni-Mg films were attempted by alternation layer deposition of Mg film and Ni film on heating substrate using magnetron spattering method. As a result, the diffraction peak of Mg(002) and Mg_2Ni(003) was observed from the films deposited at substrate temperature more than 150℃ by this method. The substrate temperature and the number of times to alternation layer deposition of Mg and Ni influence the properties, such as microstructure, surface roughness, and resistivity, of the films. Since diluted hydrogen and oxygen gas was used, a characteristic of switching from the mirror state to the transparent state was not obtained from the films by this method. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Mg-Ni / Alternate Deposition / Switching mirror |
| Paper # | CPM2007-43 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2007/8/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characteristics of Mg-Ni thin films deposited by sputtering method |
| Sub Title (in English) | |
| Keyword(1) | Mg-Ni |
| Keyword(2) | Alternate Deposition |
| Keyword(3) | Switching mirror |
| 1st Author's Name | Takashi AIKOH |
| 1st Author's Affiliation | Graduate School of Science and Technology, Niigata University() |
| 2nd Author's Name | Daisaku NAGAHAMA |
| 2nd Author's Affiliation | Graduate School of Science and Technology, Niigata University |
| 3rd Author's Name | Makoto HIRATA |
| 3rd Author's Affiliation | Graduate School of Science and Technology, Niigata University |
| 4th Author's Name | Hidehiko SHIMIZU |
| 4th Author's Affiliation | Faculty of Engineering, Niigata University |
| 5th Author's Name | Takeo MARUYAMA |
| 5th Author's Affiliation | Faculty of Engineering, Niigata University |
| 6th Author's Name | Haruo IWANO |
| 6th Author's Affiliation | Faculty of Engineering, Niigata University |
| 7th Author's Name | Takahiro KAWAKAMI |
| 7th Author's Affiliation | Faculty of Engineering, Niigata University |
| Date | 2007-08-09 |
| Paper # | CPM2007-43 |
| Volume (vol) | vol.107 |
| Number (no) | 178 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |