| Presentation | 1999/10/21 Development of Schottky Barrier Diodes with a Quarter-Micron Anodes for THz Applications Minoru Araki, Hiroaki Minamide, Takanari Yasui, Hirotomo Fujishima, Tetsu Suzuki, Koji Mizuno, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The work described here is specifically aimed at fabricating Pt/GaAs Schottky barrier diodes (SBD) with a quarter-micron anodes for THz applications. To establish stable fabrication process for SBD, an endpoint detection for ECR plasma etching has been developed using quadra-pole mass spectroscopy. Video detection performances of SBD's at 1.4 THz were evaluated. The voltage sensitivity at 4 THz was theoretically estimated. NEP 7.3×10^<-11) W/Hz^<1/2> is obtained at video frequency of 5 MHz. A mechanism of low-frequency noise was discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | terahertz / Schottky barrier diode / ECR etching / video detection / low-frequency noise |
| Paper # | EMCJ99-71,MW99-123 |
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| Conference Information | |
| Committee | EMCJ |
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| Conference Date | 1999/10/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electromagnetic Compatibility (EMCJ) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Schottky Barrier Diodes with a Quarter-Micron Anodes for THz Applications |
| Sub Title (in English) | |
| Keyword(1) | terahertz |
| Keyword(2) | Schottky barrier diode |
| Keyword(3) | ECR etching |
| Keyword(4) | video detection |
| Keyword(5) | low-frequency noise |
| 1st Author's Name | Minoru Araki |
| 1st Author's Affiliation | Research Institute of Electrical Communication, Tohoku University() |
| 2nd Author's Name | Hiroaki Minamide |
| 2nd Author's Affiliation | Photodynamics Research Center, The Institute of Physical and Cemical Research |
| 3rd Author's Name | Takanari Yasui |
| 3rd Author's Affiliation | Photodynamics Research Center, The Institute of Physical and Cemical Research |
| 4th Author's Name | Hirotomo Fujishima |
| 4th Author's Affiliation | Photodynamics Research Center, The Institute of Physical and Cemical Research |
| 5th Author's Name | Tetsu Suzuki |
| 5th Author's Affiliation | Sendai National College of Technology |
| 6th Author's Name | Koji Mizuno |
| 6th Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
| Date | 1999/10/21 |
| Paper # | EMCJ99-71,MW99-123 |
| Volume (vol) | vol.99 |
| Number (no) | 368 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |