Presentation 2007-06-29
GaInAsP/InP Membrane BH-DFB Laser with Air Bridge Structure
Hideyuki NAITOH, Shinichi SAKAMOTO, Mamoru OHTAKE, Tadashi OKUMURA, Takeo MARUYAMA, Nobuhiko NISHIYAMA, Shigehisa ARAI,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Membrane DFB laser structure is very promising for ultra low power consumption operation due to an enhanced modal gain and temperature insensitive lasing wavelength by using polymer cladding layers, e.g., BCB, which has negative temperature coefficient of refractive index. We fabricated membrane BH-DFB laser with air bridge structure by a selective etching of a sacrificial layer instead of direct wafer bonding method, which suffers from large wafer fabrication and fabrication reproducibility. A CW operation under optical pumping was attained from 10℃ up to 80℃ and the minimum threshold pump power of 4.3 mW was obtained at 20℃. From the pump power dependence of lasing wavelength, the thermal resistance was estimated to be 11 K/mW for this air-bridge membrane structure.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) DFB laser / Membrane laser / High optical confinement / GaInAsP/InP / Laterally selective etching
Paper # OPE2007-20,LQE2007-21
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Conference Information
Committee LQE
Conference Date 2007/6/22(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) GaInAsP/InP Membrane BH-DFB Laser with Air Bridge Structure
Sub Title (in English)
Keyword(1) DFB laser
Keyword(2) Membrane laser
Keyword(3) High optical confinement
Keyword(4) GaInAsP/InP
Keyword(5) Laterally selective etching
1st Author's Name Hideyuki NAITOH
1st Author's Affiliation Quantum Nanoelectronics Research Center, Tokyo Institute of Technology()
2nd Author's Name Shinichi SAKAMOTO
2nd Author's Affiliation Quantum Nanoelectronics Research Center, Tokyo Institute of Technology
3rd Author's Name Mamoru OHTAKE
3rd Author's Affiliation Quantum Nanoelectronics Research Center, Tokyo Institute of Technology
4th Author's Name Tadashi OKUMURA
4th Author's Affiliation Quantum Nanoelectronics Research Center, Tokyo Institute of Technology
5th Author's Name Takeo MARUYAMA
5th Author's Affiliation Quantum Nanoelectronics Research Center, Tokyo Institute of Technology:JST-CREST
6th Author's Name Nobuhiko NISHIYAMA
6th Author's Affiliation Quantum Nanoelectronics Research Center, Tokyo Institute of Technology:Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
7th Author's Name Shigehisa ARAI
7th Author's Affiliation Quantum Nanoelectronics Research Center, Tokyo Institute of Technology:JST-CREST
Date 2007-06-29
Paper # OPE2007-20,LQE2007-21
Volume (vol) vol.107
Number (no) 125
Page pp.pp.-
#Pages 4
Date of Issue