| Presentation | 2007/6/18 Correlation between Organic Chemical Reaction and Chemical Shift in Carbon-doped Silicon Oxide Film Teresa Oh, Hong Bae Kim, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | SiOC film with sharp Si-CH_3 bond at 1260 cm^<-1> had the main band of 870-1350 cm^<-1>, which was deconvoluted the cage link and Si-O-C, Si-O-Si and Si-CH_3 bonds. The SiOC film of the flow rate ratio of O_2/BTMSM=1.07 changed to low frequency as the red shift in the main band of 870～1350 cm^<-1> in spite of small difference of the flow rate ratio. Moreover, the peak near 838 cm^<-1> divided into two peaks at the SiOC film of the flow rate ratio of O_2/BTMSM=1.07 but other samples near 838 cm^<-1> showed the one peak. The red shift in SiOC film depended on the increasing the relative carbon content due to the variation of the bonding structure from the cross-link breakage structure to the cross-link structure. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SEM image / SiOC film / chemical shift / FTIR spectra / carbon / Si-O-C bond |
| Paper # | ED2007-133,SDM2007-138 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 2007/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Correlation between Organic Chemical Reaction and Chemical Shift in Carbon-doped Silicon Oxide Film |
| Sub Title (in English) | |
| Keyword(1) | SEM image |
| Keyword(2) | SiOC film |
| Keyword(3) | chemical shift |
| Keyword(4) | FTIR spectra |
| Keyword(5) | carbon |
| Keyword(6) | Si-O-C bond |
| 1st Author's Name | Teresa Oh |
| 1st Author's Affiliation | School of Electronics and Information Engineering, Cheongju University() |
| 2nd Author's Name | Hong Bae Kim |
| 2nd Author's Affiliation | School of Electronics and Information Engineering, Cheongju University |
| Date | 2007/6/18 |
| Paper # | ED2007-133,SDM2007-138 |
| Volume (vol) | vol.107 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |