| Presentation | 2007/6/18 Fabrication of temperature sensor using thermopile based on Silicon on Insulator (SOI) structure Wang-Hoon LEE, Young-Tae LEE, Hidekuni TAKAO, Kazuaki SAWADA, Makoto ISHIDA, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper presents a temperature measurable contact and non-contact type thermopile based on SOI structure. The sensor was designed with n-type and p-type single crystal silicon strips of 17 pairs and selective absorption film (SAP) that consists of aluminum and silicon dioxide. We have fabricated the thermopile based on SOI structure using a complementary metal-oxide semiconductor (CMOS) process. Measured sensitivity of the sensor was 0.19mV/℃, when the human skin directly touched on the sensor. In the non-contact measurement of the sensor as varying distance between the lamp (NEC, EFD10EL/8) and sensor, the maximum electromotive force of the sensor was -1.55mV at 2mm distance. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Thermopile / SOI / Thermal conductivity / Contact type / Non-contact type |
| Paper # | ED2007-121,SDM2007-126 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 2007/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of temperature sensor using thermopile based on Silicon on Insulator (SOI) structure |
| Sub Title (in English) | |
| Keyword(1) | Thermopile |
| Keyword(2) | SOI |
| Keyword(3) | Thermal conductivity |
| Keyword(4) | Contact type |
| Keyword(5) | Non-contact type |
| 1st Author's Name | Wang-Hoon LEE |
| 1st Author's Affiliation | Dept. of Electrical and Electronic Engineering, Toyohashi University of Technology() |
| 2nd Author's Name | Young-Tae LEE |
| 2nd Author's Affiliation | Dept. of Information Technology and Electronics Education, An-dong National University |
| 3rd Author's Name | Hidekuni TAKAO |
| 3rd Author's Affiliation | Dept. of Electrical and Electronic Engineering, Toyohashi University of Technology:Intelligent Sensing System Research Center, Toyohashi University of Technology:JST-CREST, Japan Science and Technology Agency |
| 4th Author's Name | Kazuaki SAWADA |
| 4th Author's Affiliation | Dept. of Electrical and Electronic Engineering, Toyohashi University of Technology:Intelligent Sensing System Research Center, Toyohashi University of Technology:JST-CREST, Japan Science and Technology Agency |
| 5th Author's Name | Makoto ISHIDA |
| 5th Author's Affiliation | Dept. of Electrical and Electronic Engineering, Toyohashi University of Technology:Intelligent Sensing System Research Center, Toyohashi University of Technology:JST-CREST, Japan Science and Technology Agency |
| Date | 2007/6/18 |
| Paper # | ED2007-121,SDM2007-126 |
| Volume (vol) | vol.107 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |