| Presentation | 2007/6/18 An In-plane 3-axis Inertial Measurement Unit with 16-bit Over-Sampled Capacitive Readout ASIC Taedong Ahn, Ahra Lee, Hyoungho Ko, Cheolkyu Han, SeungHoon Lee, Deog-Kvoon Jeong, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A high performance inertial measurement unit (IMU) with fully differential, 16-bit over-sampled capacitive readout circuit is presented. The IMU can measure the x and y axis accelerations and z axis rotation. The MEMS sensing elements are fabricated using the sacrificial bulk micromachining (SBM) process. The sensor interface circuit is fabricated using a standard 0.18-μm CMOS process. The input capacitive amplifier adopts a fully-differential, chopper-stabilized switched capacitor (SC) architecture to obtain low noise characteristics. The output of input amplifier, modulated with the chopping frequency, is converted to a digital signal by 12-bit algorithmic analog-to-digital converter (ADC), to achieve a high resolution while maintaining a low power. The digital signal is demodulated in a digital demodulator, which removes non-ideal behaviors of a multiplier. The white-noise level of the demodulated signal is effectively reduced by a subsequent decimation filter, and then 16-bit acceleration and rotation signals are obtained. The SPI and I2C interface are integrated to enhance the user-connectivity. The fabricated system is applicable for automotive systems, such as electronic stability program (ESP). |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS / SBM / IMU / accelerometer / gyroscope |
| Paper # | ED2007-118,SDM2007-123 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2007/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | An In-plane 3-axis Inertial Measurement Unit with 16-bit Over-Sampled Capacitive Readout ASIC |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | SBM |
| Keyword(3) | IMU |
| Keyword(4) | accelerometer |
| Keyword(5) | gyroscope |
| 1st Author's Name | Taedong Ahn |
| 1st Author's Affiliation | SML Electronics, Inc.() |
| 2nd Author's Name | Ahra Lee |
| 2nd Author's Affiliation | SML Electronics, Inc. |
| 3rd Author's Name | Hyoungho Ko |
| 3rd Author's Affiliation | School of Electrical Engineering and Computer Science, Seoul National University |
| 4th Author's Name | Cheolkyu Han |
| 4th Author's Affiliation | School of Electrical Engineering and Computer Science, Seoul National University |
| 5th Author's Name | SeungHoon Lee |
| 5th Author's Affiliation | Sogang University |
| 6th Author's Name | Deog-Kvoon Jeong |
| 6th Author's Affiliation | School of Electrical Engineering and Computer Science, Seoul National University |
| Date | 2007/6/18 |
| Paper # | ED2007-118,SDM2007-123 |
| Volume (vol) | vol.107 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |