| Presentation | 2007/6/18 4-bit FinFET SONOS Flash Memory : Optimization of Structure and 3D Numerical Simulation Yoon Kim, Jang-Gn Yur, Byung-Gook Park, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We study the 4-bit FinFET SONOS memory which is based on double gate MOSFETs. It is operated by channel hot electron injection (CHEI)/hot hole injection (HHI) as program/erase (P/E) mechanisms. The array of the device is based on NOR-type structure. In this paper, an improved array structure of the device is proposed. The program characteristics associated with junction depth are further investigated using 3D SILVACO ATLAS simulation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SONOS / 4bit / NOR / Flash Memory |
| Paper # | ED2007-103,SDM2007-108 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
|---|---|
| Conference Date | 2007/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
|---|---|
| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 4-bit FinFET SONOS Flash Memory : Optimization of Structure and 3D Numerical Simulation |
| Sub Title (in English) | |
| Keyword(1) | SONOS |
| Keyword(2) | 4bit |
| Keyword(3) | NOR |
| Keyword(4) | Flash Memory |
| 1st Author's Name | Yoon Kim |
| 1st Author's Affiliation | School of Electrical Engineering, Seoul National University() |
| 2nd Author's Name | Jang-Gn Yur |
| 2nd Author's Affiliation | School of Electrical Engineering, Seoul National University |
| 3rd Author's Name | Byung-Gook Park |
| 3rd Author's Affiliation | School of Electrical Engineering, Seoul National University |
| Date | 2007/6/18 |
| Paper # | ED2007-103,SDM2007-108 |
| Volume (vol) | vol.107 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |