| Presentation | 2007/6/18 Electrical characterization of nano-floating gated silicon-on-insulator memory with In_2O_3 nano-particles embedded in polyimide insulator Dong Uk Lee, Seon Pil Kim, Tae Hee Lee, Eun Kyu Kim, Hyun-Mo Koo, Won-Ju Cho, Young-Ho Kim, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated the floating gate for silicon-on-insulator (SOI) nonvolatile memory devices with In_2O_3 nano-particles embedded in polyimide insulator. Self-assembled In_2O_3 nano-particles were created by chemical reaction between the biphenyl dianhydride-p-phenylenediamine polymer precursor and indium films. The particles size and density of In_2O_3 nano-particles were 7 nm and 6×10^<11>cm^<-2>, respectively. The current-voltage and retention time of fabricated device were characterized by using semiconductor parameter analyzer. A significant threshold voltage shift of fabricated nano-floating gate memory devices obtained, because of the charging effects of In_2O_3 nano-particles. And a memory window measured about 1V at initial status. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | In_2O_3 / memory / SOI / nano-particles / nonvolatile |
| Paper # | ED2007-100,SDM2007-105 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2007/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electrical characterization of nano-floating gated silicon-on-insulator memory with In_2O_3 nano-particles embedded in polyimide insulator |
| Sub Title (in English) | |
| Keyword(1) | In_2O_3 |
| Keyword(2) | memory |
| Keyword(3) | SOI |
| Keyword(4) | nano-particles |
| Keyword(5) | nonvolatile |
| 1st Author's Name | Dong Uk Lee |
| 1st Author's Affiliation | Quantum-Function Spinics Lab. and Department of Physics, Hanyang University() |
| 2nd Author's Name | Seon Pil Kim |
| 2nd Author's Affiliation | Quantum-Function Spinics Lab. and Department of Physics, Hanyang University |
| 3rd Author's Name | Tae Hee Lee |
| 3rd Author's Affiliation | Quantum-Function Spinics Lab. and Department of Physics, Hanyang University |
| 4th Author's Name | Eun Kyu Kim |
| 4th Author's Affiliation | Quantum-Function Spinics Lab. and Department of Physics, Hanyang University |
| 5th Author's Name | Hyun-Mo Koo |
| 5th Author's Affiliation | Department of Electronic Material Engineering, Kwangwoon University |
| 6th Author's Name | Won-Ju Cho |
| 6th Author's Affiliation | Department of Electronic Material Engineering, Kwangwoon University |
| 7th Author's Name | Young-Ho Kim |
| 7th Author's Affiliation | Department of Materials Science and Engineering Hanyang University |
| Date | 2007/6/18 |
| Paper # | ED2007-100,SDM2007-105 |
| Volume (vol) | vol.107 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |