Presentation | 2007/6/18 High Performance Bottom-Gated Poly-Si Thin Film Transistors Employing Novel Extended Metal-Pad Chin-Mu Fang, Ming-Hong Chan, Feng-Tso Chien, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Thin Film Transistor with poly-silicon channel improves kink effect by reducing drain electrical field has been investigated. In this paper, we propose a novel FID poly-silicon Thin Film Transistor with field plate to improve kink effect. By employing field plate overlapped channel, the electric field crowding near drain could be mitigated due to the field plate. We also explored different length of field plate and thickness of passivation oxide by ISE TCAD simulation tool. As the results, it reduces electric field effectively to improve kink effect without sacrificing characteristics too much. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Thin Film Transistors / field-induced drain / kink effect / field plate |
Paper # | ED2007-92,SDM2007-97 |
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Conference Information | |
Committee | ED |
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Conference Date | 2007/6/18(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | High Performance Bottom-Gated Poly-Si Thin Film Transistors Employing Novel Extended Metal-Pad |
Sub Title (in English) | |
Keyword(1) | Thin Film Transistors |
Keyword(2) | field-induced drain |
Keyword(3) | kink effect |
Keyword(4) | field plate |
1st Author's Name | Chin-Mu Fang |
1st Author's Affiliation | Department of Electronic Engineering, Feng-Chia University() |
2nd Author's Name | Ming-Hong Chan |
2nd Author's Affiliation | Department of Electronic Engineering, Feng-Chia University |
3rd Author's Name | Feng-Tso Chien |
3rd Author's Affiliation | Department of Electronic Engineering, Feng-Chia University |
Date | 2007/6/18 |
Paper # | ED2007-92,SDM2007-97 |
Volume (vol) | vol.107 |
Number (no) | 110 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |