| Presentation | 2007/6/18 3-D stacked CMOS Inverters using laser crystallized poly-Si film TFTs Woo-Hyun Lee, Soon-Young Oh, hang-Geun Ahn, Won-Ju Cho, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | High performance three-dimensional (3-D) stacked poly-Si complementary metal-oxide semiconductor (CMOS) inverters with a high quality laser crystallized channel were fabricated. Low temperature crystallization methods of a-Si film using the excimer-laser annealing (ELA) and sequential lateral solidification (SLS) were performed. The NMOS thin-film-transistor (TFT) at lower layer of CMOS was fabricated on oxidized bulk Si substrate, and the PMOS TFT at upper layer of CMOS was fabricated on interlayer dielectric film. Considerably uniform silicon grains with (111) preferential crystal orientation were obtained by the laser annealing. Sub-threshold swings of fabricated NMOS at lower layer and PMOS at upper layer TFTs were 78 mV/dec. and 86 mV/dec., respectively. The field effect mobility of NMOS arid PMOS TFTs is 42.5 cm^2/V・s and 76 cm^2/V・s, respectively. Also, the on/off current ratio of both TFTs was larger than 10^7. The 3-D stacked poly-Si CMOS inverter showed excellent electrical characteristics and was enough for the vertical integrated CMOS applications. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | excimer-laser annealing / sequential lateral solidification / poly-Si TFT / CMOS |
| Paper # | ED2007-89,SDM2007-94 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2007/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 3-D stacked CMOS Inverters using laser crystallized poly-Si film TFTs |
| Sub Title (in English) | |
| Keyword(1) | excimer-laser annealing |
| Keyword(2) | sequential lateral solidification |
| Keyword(3) | poly-Si TFT |
| Keyword(4) | CMOS |
| 1st Author's Name | Woo-Hyun Lee |
| 1st Author's Affiliation | Department of Electronic Materials Engineering, Kwangwoon University() |
| 2nd Author's Name | Soon-Young Oh |
| 2nd Author's Affiliation | Nano Bio-electric Devices Team, IT Convergence & Components Laboratory, ETRI |
| 3rd Author's Name | hang-Geun Ahn |
| 3rd Author's Affiliation | Nano Bio-electric Devices Team, IT Convergence & Components Laboratory, ETRI |
| 4th Author's Name | Won-Ju Cho |
| 4th Author's Affiliation | Department of Electronic Materials Engineering, Kwangwoon University |
| Date | 2007/6/18 |
| Paper # | ED2007-89,SDM2007-94 |
| Volume (vol) | vol.107 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |