| Presentation | 2007/6/18 Surface passivations of AlGaN/GaN HEMTs using Remote-mode PECVD Jin Cherl Her, Hyun Jun Cho, Kwang Seok Seo, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | AlGaN/GaN HEMT has received much attention for high-frequency and high-power applications for its excellent material properties. The reduction of surface trap effects is one of the most important points of AlGaN/GaN HEMT fabrication. In recent years, excellent results using the SiN_x surface passivation and field-plate structures have been reported. Because of the field-plate located on the SiN_x, the film quality is very important. And the plasma sensitive AlGaN/GaN surface, the remote-mode SiN_x deposition can be useful for GaN-based devices passivation. For the ohmic contact, the high temperature (over 800℃) alloy process is commonly used and such process can damage or contaminate AlGaN/GaN surface. And 'the early surface passivation process' can enhance the AlGaN/GaN HEMT performances by reducing damage or contamination. So the deposition should be low damage process. In this paper, the SiN_x film using the remote-mode plasma enhanced chemical vapor deposition successfully deposited with low damage, high thermal-stability (up to 900℃). And the surface-trap related current collapse of the 0.4μm AlGaN/GaN HEMTs is effectively reduced. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlGaN/GaN HMET / passivation / current collapse / remote-mode plasma chemical vapor deposition |
| Paper # | ED2007-67,SDM2007-72 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2007/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Surface passivations of AlGaN/GaN HEMTs using Remote-mode PECVD |
| Sub Title (in English) | |
| Keyword(1) | AlGaN/GaN HMET |
| Keyword(2) | passivation |
| Keyword(3) | current collapse |
| Keyword(4) | remote-mode plasma chemical vapor deposition |
| 1st Author's Name | Jin Cherl Her |
| 1st Author's Affiliation | School of Electrical Engineering and Computer Science, Seoul National University() |
| 2nd Author's Name | Hyun Jun Cho |
| 2nd Author's Affiliation | School of Electrical Engineering and Computer Science, Seoul National University |
| 3rd Author's Name | Kwang Seok Seo |
| 3rd Author's Affiliation | School of Electrical Engineering and Computer Science, Seoul National University |
| Date | 2007/6/18 |
| Paper # | ED2007-67,SDM2007-72 |
| Volume (vol) | vol.107 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 3 |
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