| Presentation | 2007/6/18 3-Dimensional Vertically Integrated Nano-Shell All-Around-Gate MOSFET Chung-Jin Kim, Yang-Kyu Choi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper reports a novel 3-dimensional vertical nano-shell all-around-gate MOSFET for ultimate device scaling. The vertical nano-shell structure can be realized by introduction of a silicon thin-body formed by chemical vapor deposition (CVD) of poly-silicon and subsequent solid phase crystallization (SPC) as well as incorporation of an electrically independent inner-gate. It was verified that the vertical nano-shell MOSFET offers immunity to short-channel effects through a comparison of device performances between a nano-shell structure (double all-around-gate) and a nano-wire structure (single all-around-gate) with the aid of a SILVACO[○!R] 3-D simulator. With diverse modulations of the bias from the independently operated inner gate, the electrical characteristics of the MOSFET and the feasibility of application to a low-power transistor are investigated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Nano-shell structure / All-around-gate / Solid phase crystallization (SPC) / Short-channel effect (SCE) |
| Paper # | ED2007-61,SDM2007-66 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2007/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 3-Dimensional Vertically Integrated Nano-Shell All-Around-Gate MOSFET |
| Sub Title (in English) | |
| Keyword(1) | Nano-shell structure |
| Keyword(2) | All-around-gate |
| Keyword(3) | Solid phase crystallization (SPC) |
| Keyword(4) | Short-channel effect (SCE) |
| 1st Author's Name | Chung-Jin Kim |
| 1st Author's Affiliation | School of Electrical Engineering & Computer Science, Korea Advanced Institute of Science and Technology() |
| 2nd Author's Name | Yang-Kyu Choi |
| 2nd Author's Affiliation | School of Electrical Engineering & Computer Science, Korea Advanced Institute of Science and Technology |
| Date | 2007/6/18 |
| Paper # | ED2007-61,SDM2007-66 |
| Volume (vol) | vol.107 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |