| Presentation | 2007/6/18 Laser-induced Epitaxial Growth (LEG) Technology for High Density 3-D Stacked Memory with High Productivity Yong-Hoon Son, Jong-Wook Lee, Pilkyu Kang, U-In Chung, Joo Tae Moon, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | LEG (Laser-induced Epitaxial Growth) process has been proposed to obtain the single c-Si layer over oxide and successfully demonstrated with cell-stacked high density SRAM. With LEG process, the energy density of laser beam and the seed formation are the key factors to determine the crystal quality of Si layer on oxide. CMOSFETs on Si film prepared by LEG process have excellent behaviors in terms of both performance and its variations. It is found that high density LEG SRAMs with stacked cell transistor have fully worked with the lowest stand-by current of less than 0.3uA/Mb to date. LEG process is believed to be a promising technology for providing the high quality Si channel layer to the stacked memory devices. |
| Keyword(in Japanese) | (See Japanese page) |
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| Paper # | ED2007-57,SDM2007-62 |
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| Committee | ED |
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| Conference Date | 2007/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Laser-induced Epitaxial Growth (LEG) Technology for High Density 3-D Stacked Memory with High Productivity |
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| 1st Author's Name | Yong-Hoon Son |
| 1st Author's Affiliation | Process Development Team, Memory Division, Samsung Electronics Co., Ltd.() |
| 2nd Author's Name | Jong-Wook Lee |
| 2nd Author's Affiliation | Process Development Team, Memory Division, Samsung Electronics Co., Ltd. |
| 3rd Author's Name | Pilkyu Kang |
| 3rd Author's Affiliation | Process Development Team, Memory Division, Samsung Electronics Co., Ltd. |
| 4th Author's Name | U-In Chung |
| 4th Author's Affiliation | Process Development Team, Memory Division, Samsung Electronics Co., Ltd. |
| 5th Author's Name | Joo Tae Moon |
| 5th Author's Affiliation | Process Development Team, Memory Division, Samsung Electronics Co., Ltd. |
| Date | 2007/6/18 |
| Paper # | ED2007-57,SDM2007-62 |
| Volume (vol) | vol.107 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 2 |
| Date of Issue | |