| Presentation | 2007/6/18 Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films A-Ram Choi, Sang-Sik Choi, Byung-Guan Park, Dongwoo Suh, Gyungock Kim, Jin-Tae Kim, Jin-Soo Choi, Deok-Ho Cho, Tae-Hyun Han, Kyu-Hwan Shim, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper presents the selective epitaxial growth(SEG) properties of reduced pressure chemical vapor deposition (RPCVD) at low temperatures of 675～725℃ with high aspect ratio mask of dielectric films. The SEG process has been investigated to understand the influence of loading effect, mask pattern shape and size dependency, and RPCVD process parameter effects. In order to overcome difficulties associated with high-aspect ratio, it is critical to understand the process pressure in the ranges of a few tens Torr showing intermediate regime of kinetic and molecular flows. SiGe epi layers designed with X_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SiGe / SEG / aspect ratio / RPCVD |
| Paper # | ED2007-56,SDM2007-61 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2007/6/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films |
| Sub Title (in English) | |
| Keyword(1) | SiGe |
| Keyword(2) | SEG |
| Keyword(3) | aspect ratio |
| Keyword(4) | RPCVD |
| 1st Author's Name | A-Ram Choi |
| 1st Author's Affiliation | School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University() |
| 2nd Author's Name | Sang-Sik Choi |
| 2nd Author's Affiliation | School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University |
| 3rd Author's Name | Byung-Guan Park |
| 3rd Author's Affiliation | School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University |
| 4th Author's Name | Dongwoo Suh |
| 4th Author's Affiliation | ETRI |
| 5th Author's Name | Gyungock Kim |
| 5th Author's Affiliation | ETRI |
| 6th Author's Name | Jin-Tae Kim |
| 6th Author's Affiliation | AUK |
| 7th Author's Name | Jin-Soo Choi |
| 7th Author's Affiliation | AUK |
| 8th Author's Name | Deok-Ho Cho |
| 8th Author's Affiliation | AUK |
| 9th Author's Name | Tae-Hyun Han |
| 9th Author's Affiliation | AUK |
| 10th Author's Name | Kyu-Hwan Shim |
| 10th Author's Affiliation | School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University |
| Date | 2007/6/18 |
| Paper # | ED2007-56,SDM2007-61 |
| Volume (vol) | vol.107 |
| Number (no) | 110 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |