Presentation 2007/6/18
Stress Effect Analysis for PD-SOI pMOSFETs with Undoped-Si_<0.88>Ge_<0.12> Heterostructure Channel
Sang-Sik Choi, A-Ram Choi, Jae-Yeon Kim, Jeon-Wook Yang, Yong-Woo Hwang, Tae-Hyun Han, Deok Ho Cho, Kyu-Hwan Shim,
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Abstract(in English) The stress effect of SiGe p-type metal oxide semiconductor field effect transistors(MOSFETs) has been investigated to compare property of devices made of the Si Bulk and the partially depleted silicon on insulator(PD SOI). The electrical properties in SiGe PD SOI presented enhancements in subthreshold slope and drain induced barrier lowering in comparison to SiGe bulk. Threshold voltage shift is monitored as a function of hot carrier stress time of both structures. Hot carrier induced device degradation is observed significant from I-V measurements at specified stress intervals. A comparison of the V_ shift for the SiGe Bulk and the SiGe PD SOI devices clearly shows that the SiGe PD SOI is more immune from hot carriers than the SiGe Bulk. The 1/f noise increase was not serious after hot carrier stress as measured in saturation mode. It is concluded that the properties of SiGe PD SOI could be maintained stable in operation of hot carrier injection condition.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) SiGe / MOSFET / PD SOI / stress effect
Paper # ED2007-52,SDM2007-57
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Committee ED
Conference Date 2007/6/18(1days)
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Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Stress Effect Analysis for PD-SOI pMOSFETs with Undoped-Si_<0.88>Ge_<0.12> Heterostructure Channel
Sub Title (in English)
Keyword(1) SiGe
Keyword(2) MOSFET
Keyword(3) PD SOI
Keyword(4) stress effect
1st Author's Name Sang-Sik Choi
1st Author's Affiliation School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University()
2nd Author's Name A-Ram Choi
2nd Author's Affiliation School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University
3rd Author's Name Jae-Yeon Kim
3rd Author's Affiliation School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University
4th Author's Name Jeon-Wook Yang
4th Author's Affiliation School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University
5th Author's Name Yong-Woo Hwang
5th Author's Affiliation Radio Frequency Devices Division, AUK
6th Author's Name Tae-Hyun Han
6th Author's Affiliation Radio Frequency Devices Division, AUK
7th Author's Name Deok Ho Cho
7th Author's Affiliation Radio Frequency Devices Division, AUK
8th Author's Name Kyu-Hwan Shim
8th Author's Affiliation School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University
Date 2007/6/18
Paper # ED2007-52,SDM2007-57
Volume (vol) vol.107
Number (no) 110
Page pp.pp.-
#Pages 4
Date of Issue