| Presentation | 2007/5/17 Growth of SiC film and carbon nano-structure by thermal deposition with hydrogen Yasuhiro Ogawa, Yoshitaka Hashimoto, Atushi Nakamura, Akira Tanaka, Jiro Temmyo, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Carbon nano-structure was prepared by thermal decompotision using amorphous SiC film. The SiC films were grown by Remote Plasma Enhanced Chemical Vapor Deposition(RPE-CVD) using HMDS. It was clear FT-IR absorption peak of Si-C bond is incresae at 750℃ and 0.07Torr. Carbon nano-structure was prepared by thermal decompotision using amorphous SiC film by RPE-CVD,and graphite was prepared.Prepared graphite was decreased by rising substrate temperature and flowing hydorogen at theramal decomposition. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | RPE-CVD / SiC / Thermal Decompotsition on SiC / graphite |
| Paper # | ED2007-28,CPM2007-27,SDM2007-28 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2007/5/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of SiC film and carbon nano-structure by thermal deposition with hydrogen |
| Sub Title (in English) | |
| Keyword(1) | RPE-CVD |
| Keyword(2) | SiC |
| Keyword(3) | Thermal Decompotsition on SiC |
| Keyword(4) | graphite |
| 1st Author's Name | Yasuhiro Ogawa |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | Yoshitaka Hashimoto |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Atushi Nakamura |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 4th Author's Name | Akira Tanaka |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 5th Author's Name | Jiro Temmyo |
| 5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2007/5/17 |
| Paper # | ED2007-28,CPM2007-27,SDM2007-28 |
| Volume (vol) | vol.107 |
| Number (no) | 56 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |