Presentation | 2007/5/17 Epitaxial Growth of CuInSe_2 Thin Films by Flash Evaporation Akinori ITO, Wataru HIRAOKA, Takahiro TAKAHASHI, Yoshinori EMA, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The conditions for epitaxial growth of CuInSe_2 thin films on GaAs(100) substrate have been investigated. Samples were prepared at 420℃ substrate temperature by feeding ~300ng CuInSe_2 alloy chunks periodically. Best epitaxial film was obtained by feeding chunks for the deposition rate of ~3Å/sec. Excess feeding made a (112)-oriented CuInSe_2 film. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | CuInSe_2 / GaAs / flash evaporation / chalcopyrite-type / epitaxial growth |
Paper # | ED2007-22,CPM2007-21,SDM2007-22 |
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Conference Information | |
Committee | SDM |
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Conference Date | 2007/5/17(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Epitaxial Growth of CuInSe_2 Thin Films by Flash Evaporation |
Sub Title (in English) | |
Keyword(1) | CuInSe_2 |
Keyword(2) | GaAs |
Keyword(3) | flash evaporation |
Keyword(4) | chalcopyrite-type |
Keyword(5) | epitaxial growth |
1st Author's Name | Akinori ITO |
1st Author's Affiliation | Graduate School of Science and Engineering, Shizuoka University() |
2nd Author's Name | Wataru HIRAOKA |
2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Shizuoka University |
3rd Author's Name | Takahiro TAKAHASHI |
3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Shizuoka University |
4th Author's Name | Yoshinori EMA |
4th Author's Affiliation | Department of Electrical and Electronic Engineering, Shizuoka University |
Date | 2007/5/17 |
Paper # | ED2007-22,CPM2007-21,SDM2007-22 |
Volume (vol) | vol.107 |
Number (no) | 56 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |