Presentation | 2007/5/17 Growth of high quality ZnO film and application for UV detector Takao HAYASHI, Atsushi NAKAMURA, Jiro TEMMYO, Nabarro Tober Alvaro, Munoz Merino Elias, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | ZnO thin films were grown by remote plasma enhanced MOCVD. Diethyl zinc (DEZn) were used as group-II source. Oxygen gas were used as group-VI source, and VI/II ratio was controlled by varying flowing quantity of oxygen gas. The surface morphology of ZnO thin film is shape like the rod when VI/II ratio is small. It has changed into a smooth surface by increasing VI/II ratio. And the carrier concentration of ZnO thin film has been decreased from 5E+18 cm^<-3> to 5E+17 cm^<-3> by changing VI/II ratio. Mg_xZn_<1-x>O UV detectors were fabricated and evaluated. An excellent cutoff characteristic was obtained form Mg_xZn_<1-x>O UV detectors, and wavelength has changed from 370 nm to 350 nm. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | high quality ZnO film / UV detector / VI/II ratio / surface morphology / carrier concentration |
Paper # | ED2007-12,CPM2007-11,SDM2007-12 |
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Conference Information | |
Committee | SDM |
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Conference Date | 2007/5/17(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Growth of high quality ZnO film and application for UV detector |
Sub Title (in English) | |
Keyword(1) | high quality ZnO film |
Keyword(2) | UV detector |
Keyword(3) | VI/II ratio |
Keyword(4) | surface morphology |
Keyword(5) | carrier concentration |
1st Author's Name | Takao HAYASHI |
1st Author's Affiliation | Reseach Institute of Electronics, Shizuoka University() |
2nd Author's Name | Atsushi NAKAMURA |
2nd Author's Affiliation | Reseach Institute of Electronics, Shizuoka University |
3rd Author's Name | Jiro TEMMYO |
3rd Author's Affiliation | Reseach Institute of Electronics, Shizuoka University |
4th Author's Name | Nabarro Tober Alvaro |
4th Author's Affiliation | ISOM, Universidad Politecnica de Madrid |
5th Author's Name | Munoz Merino Elias |
5th Author's Affiliation | ISOM, Universidad Politecnica de Madrid |
Date | 2007/5/17 |
Paper # | ED2007-12,CPM2007-11,SDM2007-12 |
Volume (vol) | vol.107 |
Number (no) | 56 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |