Presentation | 2007/5/17 Influence of the thickness on β-Ga_2O_3 Oxygen Gas Sensor at High Temperature Marilena Bartic, Cristian-Ioan Baban, Masaaki Isai, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | β-Ga_2O_3 thin films sensors in a sandwich structure with various thicknesses of 380 nm to 1250 nm approximately by sputtering technique. The oxygen sensing characteristics were evaluated as a function of film thickness in N_2/O_2 gas stream mixture at high temperature, 1000℃. The electrical resistance of thin films was increased rnonotonicaily with an increasing film thickness. It was found that both the response time and sensitivity of β-Ga_2O_3 sensors to oxygen gas were decreasing when film thickness decreased. The relationship between gas sensing properties and film thickness was discussed on the basis of oxygen gas reactivity on the film surface and inside the oxide films at 1000℃. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | gallium oxide / oxygen sensor / sensitivity / high temperature |
Paper # | ED2007-9,CPM2007-8,SDM2007-9 |
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Conference Information | |
Committee | SDM |
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Conference Date | 2007/5/17(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Silicon Device and Materials (SDM) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Influence of the thickness on β-Ga_2O_3 Oxygen Gas Sensor at High Temperature |
Sub Title (in English) | |
Keyword(1) | gallium oxide |
Keyword(2) | oxygen sensor |
Keyword(3) | sensitivity |
Keyword(4) | high temperature |
1st Author's Name | Marilena Bartic |
1st Author's Affiliation | GSEST of Shizuoka University() |
2nd Author's Name | Cristian-Ioan Baban |
2nd Author's Affiliation | Faculty of Physics, Al. I. Cuza University |
3rd Author's Name | Masaaki Isai |
3rd Author's Affiliation | GSEST of Shizuoka University |
Date | 2007/5/17 |
Paper # | ED2007-9,CPM2007-8,SDM2007-9 |
Volume (vol) | vol.107 |
Number (no) | 56 |
Page | pp.pp.- |
#Pages | 5 |
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