| Presentation | 2007-05-25 Development of On-Chip Integrated Micro Magnetic Field Probe Shota KOYA, Hideki TORIZUKA, Masahiro YAMAGUCHI, Satoshi AOYAMA, Shoji KAWAHITO, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The development of high-frequency and high-spatial-resolution magnetic field probe to solve the problem of Electromagnetic Interference is strongly hoped. It is thought that an miniaturized coil will obtain enough output if it is combined with the integrated amplifier by using the Si multilayer wiring substrate, and as a result, the spatial resolution of the probe can be improved. However, the problems are expected that wiring resistance is high or magnetic flux transmits the wiring layers, because metal wiring layers are very thin. Then, almost enough performances were confirmed after the shielded loop type integrated micro magnetic field probe was developed with the general-purpose chip service and the characteristics were evaluated. The author showed the possibility of development of a magnetic field probe that has high spatial resolution of several μm order if it is combined with the integrated amplifier. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | chip service / Si multilayer wiring substrate / active probe / shielded loop coil |
| Paper # | EMCJ2007-15 |
| Date of Issue |
| Conference Information | |
| Committee | EMCJ |
|---|---|
| Conference Date | 2007/5/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromagnetic Compatibility (EMCJ) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of On-Chip Integrated Micro Magnetic Field Probe |
| Sub Title (in English) | |
| Keyword(1) | chip service |
| Keyword(2) | Si multilayer wiring substrate |
| Keyword(3) | active probe |
| Keyword(4) | shielded loop coil |
| 1st Author's Name | Shota KOYA |
| 1st Author's Affiliation | Graduate School of Engineering, Tohoku University() |
| 2nd Author's Name | Hideki TORIZUKA |
| 2nd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 3rd Author's Name | Masahiro YAMAGUCHI |
| 3rd Author's Affiliation | Graduate School of Engineering, Tohoku University |
| 4th Author's Name | Satoshi AOYAMA |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 5th Author's Name | Shoji KAWAHITO |
| 5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2007-05-25 |
| Paper # | EMCJ2007-15 |
| Volume (vol) | vol.107 |
| Number (no) | 68 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |