Presentation | 2007/5/17 Single-electron-tunneling characteristics of SOI-MOSFETs with ultra thin Si layer doped Phosphorus Daisuke NAGATA, Kazuhito EBISAWA, Daniel Moraru, Michiharu TABE, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have fabricated ultrathin SOI-MOSFETs doped with phosphorus and measured their electrical characteristics. We observed large coulomb blockade oscillations when the device size is decreased and P-dopant density is increased. Furthermore, we also observed different peak ratio of coulomb blockade oscillation for two devices with same channel size but difference doping density. These results indicate that P dopants play an important role on the formation of multiple tunnel junctions. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | coulomb blockade / dopant potential / random multiple tunnel junctions / single-electron transfer |
Paper # | ED2007-24,CPM2007-23,SDM2007-24 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2007/5/17(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Single-electron-tunneling characteristics of SOI-MOSFETs with ultra thin Si layer doped Phosphorus |
Sub Title (in English) | |
Keyword(1) | coulomb blockade |
Keyword(2) | dopant potential |
Keyword(3) | random multiple tunnel junctions |
Keyword(4) | single-electron transfer |
1st Author's Name | Daisuke NAGATA |
1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
2nd Author's Name | Kazuhito EBISAWA |
2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
3rd Author's Name | Daniel Moraru |
3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
4th Author's Name | Michiharu TABE |
4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
Date | 2007/5/17 |
Paper # | ED2007-24,CPM2007-23,SDM2007-24 |
Volume (vol) | vol.107 |
Number (no) | 55 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |