| Presentation | 2007/5/17 ZnO thin layers growen by sideflow PRE-MOCVD Masahiko ADACHI, Tsuyoshi AOSHIMA, Atsushi NAKAMURA, Jiro TEMMYO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | ZnO layers growth on a-plane sapphire(11-20)substrates by sideflow remote plasma enhanced MOCVD (RPE-MOCVD) was studied. The relation between thickness distribution and growth mode was noticed. We successfully controlled growth from thin layers to nanostructures, by varying growth temperature, pressure and VI/II ratio. The growth temperature dependency of an optical property of the ZnO thin layers was characterized by photoluminescence measurement. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | sideflow reaction chamber / remote plasma enhanced MOCVD / nanorods / nanowires |
| Paper # | ED2007-21,CPM2007-20,SDM2007-21 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2007/5/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | ZnO thin layers growen by sideflow PRE-MOCVD |
| Sub Title (in English) | |
| Keyword(1) | sideflow reaction chamber |
| Keyword(2) | remote plasma enhanced MOCVD |
| Keyword(3) | nanorods |
| Keyword(4) | nanowires |
| 1st Author's Name | Masahiko ADACHI |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | Tsuyoshi AOSHIMA |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Atsushi NAKAMURA |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 4th Author's Name | Jiro TEMMYO |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2007/5/17 |
| Paper # | ED2007-21,CPM2007-20,SDM2007-21 |
| Volume (vol) | vol.107 |
| Number (no) | 55 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |