| Presentation | 2007/5/17 Oxidation of a-CN_x:HF Films in Air by Ultraviolet Light Irradiation Katsutoshi SAKURAI, Haruhisa KINOSHITA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Using polymer-like amorphous CN_x:H films deposited by supermagnetron plasma, ultraviolet-light irradiation effects were studied. Upper and lower electrode RF power (UPRF/LORF) was selected to 1/1 W or 5/5 W, and films were deposited using i-C_4H_<10>/N_2 plasma. Under exposure of 325 nm He-Cd laser, photoluminescence (PL) intensity was decreased and FT-IR absorbance spectrum was changed. Similar changes of FT-IR spectra were observed under Xe lamp exposure. In both cases, decrease of CH peal intensity and increase of OH and CO peak intensities were observed. By x-ray fluorescence spectroscopy (XFS) analysis, increase of O atom density and no change of N atom density were observed under UV light exposure. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | a-CN_x:H / photoluminescence / FT-IR / ultraviolet light / oxidation |
| Paper # | ED2007-19,CPM2007-18,SDM2007-19 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2007/5/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Oxidation of a-CN_x:HF Films in Air by Ultraviolet Light Irradiation |
| Sub Title (in English) | |
| Keyword(1) | a-CN_x:H |
| Keyword(2) | photoluminescence |
| Keyword(3) | FT-IR |
| Keyword(4) | ultraviolet light |
| Keyword(5) | oxidation |
| 1st Author's Name | Katsutoshi SAKURAI |
| 1st Author's Affiliation | Graduate School of Electronic Sciende and Technology, Shizuoka University() |
| 2nd Author's Name | Haruhisa KINOSHITA |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2007/5/17 |
| Paper # | ED2007-19,CPM2007-18,SDM2007-19 |
| Volume (vol) | vol.107 |
| Number (no) | 55 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |