| Presentation | 2007/5/17 Growth of high quality ZnO film and application for UV detector Takao HAYASHI, Atsushi NAKAMURA, Jiro TEMMYO, Nabarro Tober Alvaro, Munoz Merino Elias, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | ZnO thin films were grown by remote plasma enhanced MOCVD. Diethyl zinc (DEZn) were used as group-II source. Oxygen gas were used as group-VI source, and VI/II ratio was controlled by varying flowing quantity of oxygen gas. The surface morphology of ZnO thin film is shape like the rod when VI/II ratio is small. It has changed into a smooth surface by increasing VI/II ratio. And the carrier concentration of ZnO thin film has been decreased from 5E+18 cm^<-3> to 5E+17 cm^<-3> by changing VI/II ratio. Mg_xZn_<1-x>O UV detectors were fabricated and evaluated. An excellent cutoff characteristic was obtained form Mg_xZn_<1-x>O UV detectors, and wavelength has changed from 370 nm to 350 nm. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | high quality ZnO film / UV detector / VI/II ratio / surface morphology / carrier concentration |
| Paper # | ED2007-12,CPM2007-11,SDM2007-12 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2007/5/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of high quality ZnO film and application for UV detector |
| Sub Title (in English) | |
| Keyword(1) | high quality ZnO film |
| Keyword(2) | UV detector |
| Keyword(3) | VI/II ratio |
| Keyword(4) | surface morphology |
| Keyword(5) | carrier concentration |
| 1st Author's Name | Takao HAYASHI |
| 1st Author's Affiliation | Reseach Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | Atsushi NAKAMURA |
| 2nd Author's Affiliation | Reseach Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Jiro TEMMYO |
| 3rd Author's Affiliation | Reseach Institute of Electronics, Shizuoka University |
| 4th Author's Name | Nabarro Tober Alvaro |
| 4th Author's Affiliation | ISOM, Universidad Politecnica de Madrid |
| 5th Author's Name | Munoz Merino Elias |
| 5th Author's Affiliation | ISOM, Universidad Politecnica de Madrid |
| Date | 2007/5/17 |
| Paper # | ED2007-12,CPM2007-11,SDM2007-12 |
| Volume (vol) | vol.107 |
| Number (no) | 55 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |