Presentation 2007/5/17
Development of large-area X-ray and γ-ray imaging detectors using thick CdTe layer grown by MOVPE(I)
Motohiro Omura, Koji Nakamura, Ryuichi Tanaka, Yasunori Agata, Madan Niraula, Kazuhito Yasuda,
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Abstract(in English) MOVPE growth of thick CdTe layers for the application in x-ray, γ-ray detectors has been studied. As reported earlier we reported, pretreatment of Si-substrate, carried out by annealing it with pieces of GaAs, was necessary for achieving direct growth of CdTe layers on Si. However, thicker epilayer(>50μm) exhibited poor substrate adhesion. By optimizing substrate pre-treatment condition, and with careful control of growth parameter, high quality thick epilayer of thickness greater then 100μm were achieved, and are reported here.
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Keyword(in English) MOVPE / X- and γ-ray detector / thick CdTe layers / Si substrate
Paper # ED2007-10,CPM2007-9,SDM2007-10
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Committee CPM
Conference Date 2007/5/17(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) Development of large-area X-ray and γ-ray imaging detectors using thick CdTe layer grown by MOVPE(I)
Sub Title (in English)
Keyword(1) MOVPE
Keyword(2) X- and γ-ray detector
Keyword(3) thick CdTe layers
Keyword(4) Si substrate
1st Author's Name Motohiro Omura
1st Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering Nagoya Institute of Technology()
2nd Author's Name Koji Nakamura
2nd Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering Nagoya Institute of Technology
3rd Author's Name Ryuichi Tanaka
3rd Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering Nagoya Institute of Technology
4th Author's Name Yasunori Agata
4th Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering Nagoya Institute of Technology
5th Author's Name Madan Niraula
5th Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering Nagoya Institute of Technology
6th Author's Name Kazuhito Yasuda
6th Author's Affiliation Department of Engineering Physics, Electronics and Mechanics, Graduate School of Engineering Nagoya Institute of Technology
Date 2007/5/17
Paper # ED2007-10,CPM2007-9,SDM2007-10
Volume (vol) vol.107
Number (no) 55
Page pp.pp.-
#Pages 4
Date of Issue