Presentation 2007/5/17
Influence of the thickness on β-Ga_2O_3 Oxygen Gas Sensor at High Temperature
Marilena Bartic, Cristian-Ioan Baban, Masaaki Isai,
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Abstract(in English) β-Ga_2O_3 thin films sensors in a sandwich structure with various thicknesses of 380 nm to 1250 nm approximately by sputtering technique. The oxygen sensing characteristics were evaluated as a function of film thickness in N_2/O_2 gas stream mixture at high temperature, 1000℃. The electrical resistance of thin films was increased rnonotonicaily with an increasing film thickness. It was found that both the response time and sensitivity of β-Ga_2O_3 sensors to oxygen gas were decreasing when film thickness decreased. The relationship between gas sensing properties and film thickness was discussed on the basis of oxygen gas reactivity on the film surface and inside the oxide films at 1000℃.
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Keyword(in English) gallium oxide / oxygen sensor / sensitivity / high temperature
Paper # ED2007-9,CPM2007-8,SDM2007-9
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Committee CPM
Conference Date 2007/5/17(1days)
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Registration To Component Parts and Materials (CPM)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Influence of the thickness on β-Ga_2O_3 Oxygen Gas Sensor at High Temperature
Sub Title (in English)
Keyword(1) gallium oxide
Keyword(2) oxygen sensor
Keyword(3) sensitivity
Keyword(4) high temperature
1st Author's Name Marilena Bartic
1st Author's Affiliation GSEST of Shizuoka University()
2nd Author's Name Cristian-Ioan Baban
2nd Author's Affiliation Faculty of Physics, Al. I. Cuza University
3rd Author's Name Masaaki Isai
3rd Author's Affiliation GSEST of Shizuoka University
Date 2007/5/17
Paper # ED2007-9,CPM2007-8,SDM2007-9
Volume (vol) vol.107
Number (no) 55
Page pp.pp.-
#Pages 5
Date of Issue