| Presentation | 2007-05-21 SR Direct Etching of PTFE and Fabrication of Millimeter-Wave PTFE Waveguide : Utilizing Beam Line, BL2 of 1.5 Gev Synchrotron Facility "New SUBARU" Mitsuyoshi KISHIHARA, Yoshiaki UKITA, Shigeaki YAMAMOTO, Yuichi UTSUMI, Isao OHTA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Microdevices have recently been developed by various micromachining technologies such as laser cutting, lithography, etc. is widely used as a microwave and millimeter-wave material. However, it is known that PTFE is too difficult to cut with high precision by conventional machining, or even by laser cutting or electrical discharge machining. It has been reported that PTFE microstructures can be fabricated by direct exposure to synchrotron radiation. In this paper, the SR direct etching of PTFE is introduced and a trial fabrication of millimeter-wave PTFE waveguide by sputter deposition of metal is attempted. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Millimeter-wave / Waveguide / SR etching / Waveguide bend / Microdevice |
| Paper # | MW2007-15 |
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| Committee | MW |
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| Conference Date | 2007/5/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Microwaves (MW) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | SR Direct Etching of PTFE and Fabrication of Millimeter-Wave PTFE Waveguide : Utilizing Beam Line, BL2 of 1.5 Gev Synchrotron Facility "New SUBARU" |
| Sub Title (in English) | |
| Keyword(1) | Millimeter-wave |
| Keyword(2) | Waveguide |
| Keyword(3) | SR etching |
| Keyword(4) | Waveguide bend |
| Keyword(5) | Microdevice |
| 1st Author's Name | Mitsuyoshi KISHIHARA |
| 1st Author's Affiliation | Faculty of Computer Science & System Engineering, Okayama Prefectural University() |
| 2nd Author's Name | Yoshiaki UKITA |
| 2nd Author's Affiliation | Faculty of Computer Science & System Engineering, Okayama Prefectural University |
| 3rd Author's Name | Shigeaki YAMAMOTO |
| 3rd Author's Affiliation | Laboratory of Advanced Science and Technology for Industry, University of Hyogo |
| 4th Author's Name | Yuichi UTSUMI |
| 4th Author's Affiliation | Laboratory of Advanced Science and Technology for Industry, University of Hyogo |
| 5th Author's Name | Isao OHTA |
| 5th Author's Affiliation | Graduate School of Engineering, University of Hyogo |
| Date | 2007-05-21 |
| Paper # | MW2007-15 |
| Volume (vol) | vol.107 |
| Number (no) | 49 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |