| Presentation | 2007-05-25 Fabrication of Si Photonic Wire Waveguide by Selective Oxidation of Si Koichi IIYAMA, Satoshi ASAI, Masahiro WAKASHIMA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Si photonic wire waveguides are fabricated by selective oxidation of Si. A SOI wafer on which a 3 μm-wide Si_3N_4 film is formed is oxidized. The Si under the Si_3N_4 film is not oxidized and works as a core, and the Si without the Si_3N_4 film is oxidized and works as a clad. The roughness at the core/clad interface is smoothed while the oxidation process, and then the propagation loss is reduced. The resultant waveguide is multimode, and the propagation loss is decreased by 4 dB as compared to the conventional fabrication process. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Optical waveguide / Si photonic wire waveguide / Selective oxidation / Propagation loss |
| Paper # | LQE2007-15 |
| Date of Issue |
| Conference Information | |
| Committee | LQE |
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| Conference Date | 2007/5/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Si Photonic Wire Waveguide by Selective Oxidation of Si |
| Sub Title (in English) | |
| Keyword(1) | Optical waveguide |
| Keyword(2) | Si photonic wire waveguide |
| Keyword(3) | Selective oxidation |
| Keyword(4) | Propagation loss |
| 1st Author's Name | Koichi IIYAMA |
| 1st Author's Affiliation | Graduate School of Natural Science & Technology, Kanazawa Univserity() |
| 2nd Author's Name | Satoshi ASAI |
| 2nd Author's Affiliation | Graduate School of Natural Science & Technology, Kanazawa Univserity |
| 3rd Author's Name | Masahiro WAKASHIMA |
| 3rd Author's Affiliation | Faculty of Engineering, Kanazawa Univserity |
| Date | 2007-05-25 |
| Paper # | LQE2007-15 |
| Volume (vol) | vol.107 |
| Number (no) | 71 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |