| Presentation | 2007-04-20 Improvement in the performance of Electrostatically Controlled Linear Inchworm Actuator for DGEQ Takuto MAEDA, Ikuo KUMAGAYA, Tomomi SANO, Michiko HARUMOTO, Makoto KATAYAMA, Satoshi KONISHI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper reports MEMS based electrostatically controlled linear inchworm actuator (ECLIA) for mechanical dynamic gain equalizer (DGEQ). DGEQ equalizes non-uniformity of spectral intensity in WDM transmission. A designed DGEQ takes the following advantages of ECLIA; Precise motion, Large stroke, Parallel motion of arrayed multi sliders Batch-fabricated multi sliders for DGEQ are presented as the slider system to realize high-resolution optical loss spectrum. In addition, we report a new Driving stage to reduce vertical displacement. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ECLIA / DGEQ / Parallel Motion / WDM |
| Paper # | R2007-4,CPM2007-4,OPE2007-4 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2007/4/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Improvement in the performance of Electrostatically Controlled Linear Inchworm Actuator for DGEQ |
| Sub Title (in English) | |
| Keyword(1) | ECLIA |
| Keyword(2) | DGEQ |
| Keyword(3) | Parallel Motion |
| Keyword(4) | WDM |
| 1st Author's Name | Takuto MAEDA |
| 1st Author's Affiliation | Science and Engineering, Ritsumeikan University() |
| 2nd Author's Name | Ikuo KUMAGAYA |
| 2nd Author's Affiliation | Science and Engineering, Ritsumeikan University |
| 3rd Author's Name | Tomomi SANO |
| 3rd Author's Affiliation | Sumitomo Electric Industries, Ltd. |
| 4th Author's Name | Michiko HARUMOTO |
| 4th Author's Affiliation | Sumitomo Electric Industries, Ltd. |
| 5th Author's Name | Makoto KATAYAMA |
| 5th Author's Affiliation | Sumitomo Electric Industries, Ltd. |
| 6th Author's Name | Satoshi KONISHI |
| 6th Author's Affiliation | Science and Engineering, Ritsumeikan University |
| Date | 2007-04-20 |
| Paper # | R2007-4,CPM2007-4,OPE2007-4 |
| Volume (vol) | vol.107 |
| Number (no) | 8 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |