Presentation 2007-03-07
A Scalable Model of Shielded Capacitors using Mirror Image Effects
Koji ISHIBASHI, Minoru FUJISHIMA,
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Abstract(in English) The comb capacitor models based on the measurement is reported. However, there are a problem of not scalable model and not corresponding to the millimeter weve and the sub millimeter wave. In this paper, in order to realize high frequency comb capacitor's scalable model, hte capacitance estimation type that considered the effect of the mirror image was applied. In addition, to decrease the influence of the substrate resistance, floating shield is proposed. As a results, in 90nm 1P9M process the RMS error rations of the penetration characteristic and the reflection characteristic are within 7% and 5%. In addition it was confirmed that Q value to the differential signal improved by 20% at 30-110 GHz by applying the floating shield compared with a conventional capacitors with the electromagnetic simulation.
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Keyword(in English) Comb Capacitor / Scalable Model / Millimeter Wave / CMOS
Paper # VLD2006-107,ICD2006-198
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Committee ICD
Conference Date 2007/2/28(1days)
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Registration To Integrated Circuits and Devices (ICD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A Scalable Model of Shielded Capacitors using Mirror Image Effects
Sub Title (in English)
Keyword(1) Comb Capacitor
Keyword(2) Scalable Model
Keyword(3) Millimeter Wave
Keyword(4) CMOS
1st Author's Name Koji ISHIBASHI
1st Author's Affiliation School of Frontier Sciences, The University of Tokyo()
2nd Author's Name Minoru FUJISHIMA
2nd Author's Affiliation School of Frontier Sciences, The University of Tokyo
Date 2007-03-07
Paper # VLD2006-107,ICD2006-198
Volume (vol) vol.106
Number (no) 550
Page pp.pp.-
#Pages 6
Date of Issue