| Presentation | 2007/2/21 Miniaturization of Piezoelectric Trasformer Hideo ADACHI, Hironori ICHIHARA, Katsuhiro WAKABAYASHI, Akiko MIZUNUMA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A feasibility discussion on the application of a junction structured Rosen type piezoelectric transformer to the electric source device for MEMS electrostatic devices was performed using finite element modeling (FEM) analysis and some experiments. In the FEM analysis, an influence of junction layer existence and a size effect were calculated mainly. And in experiment, three kinds of sized junction type devices from different piezoelectric ceramics, W : t : 2L equal to 1 : 1 : 2.5, 2 : 2 : 5, 3 : 3 : 7 (unit:mm) were fabricated. Then measurements on frequency dependences of impedance and step-up ratio were performed. The results of the FEM simulation and experiments are reported. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Rosen type / Electrostatic driving MEMS / Different piezoelectric materials / Junction structure / Step-up ratio / FEM |
| Paper # | US2006-114 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 2007/2/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Miniaturization of Piezoelectric Trasformer |
| Sub Title (in English) | |
| Keyword(1) | Rosen type |
| Keyword(2) | Electrostatic driving MEMS |
| Keyword(3) | Different piezoelectric materials |
| Keyword(4) | Junction structure |
| Keyword(5) | Step-up ratio |
| Keyword(6) | FEM |
| 1st Author's Name | Hideo ADACHI |
| 1st Author's Affiliation | R&D Division, Olympus Medical Systems Corp.() |
| 2nd Author's Name | Hironori ICHIHARA |
| 2nd Author's Affiliation | VE Technology Department, Olympus Corp. |
| 3rd Author's Name | Katsuhiro WAKABAYASHI |
| 3rd Author's Affiliation | R&D Division, Olympus Medical Systems Corp. |
| 4th Author's Name | Akiko MIZUNUMA |
| 4th Author's Affiliation | R&D Division, Olympus Medical Systems Corp. |
| Date | 2007/2/21 |
| Paper # | US2006-114 |
| Volume (vol) | vol.106 |
| Number (no) | 543 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |