Presentation 2007-01-19
Improvement of Breakdown Voltage in AlGaN/GaN/AlGaN Double-Heterojunction FET with AlN Buffer Layer
Hisayoshi MATSUO, Hiroaki UENO, Tetsuzo UEDA, Tsuyoshi TANAKA,
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Abstract(in English) GaN-based compound semiconductors are promising for future power switching devices because of the high breakdown field with high saturation drift velocity. However, aiming at the practical use, further reduction of the off-state leakage current and increase of the breakdown voltage are strongly desired. In this paper, we report the AlGaN/GaN/AlGaN double-heterojunction (DH) transistors with high breakdown voltage. The AlN buffer layer drastically reduce the off-state leakage current and increase the breakdown voltage compared with conventional single-heterojunction (SH) FET.
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Keyword(in English) AlGaN/GaN heterojunction field effect transistor / double-heterojunction / power device / high breakdown voltage / low leakage current
Paper # ED2006-234,MW2006-187
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Committee ED
Conference Date 2007/1/10(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Improvement of Breakdown Voltage in AlGaN/GaN/AlGaN Double-Heterojunction FET with AlN Buffer Layer
Sub Title (in English)
Keyword(1) AlGaN/GaN heterojunction field effect transistor
Keyword(2) double-heterojunction
Keyword(3) power device
Keyword(4) high breakdown voltage
Keyword(5) low leakage current
1st Author's Name Hisayoshi MATSUO
1st Author's Affiliation Semiconductor Device Research Center, Matsushita Electric Industrial Co., Ltd.()
2nd Author's Name Hiroaki UENO
2nd Author's Affiliation Semiconductor Device Research Center, Matsushita Electric Industrial Co., Ltd.
3rd Author's Name Tetsuzo UEDA
3rd Author's Affiliation Semiconductor Device Research Center, Matsushita Electric Industrial Co., Ltd.
4th Author's Name Tsuyoshi TANAKA
4th Author's Affiliation Semiconductor Device Research Center, Matsushita Electric Industrial Co., Ltd.
Date 2007-01-19
Paper # ED2006-234,MW2006-187
Volume (vol) vol.106
Number (no) 459
Page pp.pp.-
#Pages 4
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