Presentation 2007-01-18
A Study on Material Measurement Methods Using FDTD Simulation Techniques : Measurements of Surface Resistance of Metals and Dielectric Plates Including Semiconductor Wafer in Millimeter-wave Range
Yukio IIDA, Koichi NAKAO, Yasuhisa OMURA, Susumu TAMURA,
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Abstract(in English) The measurement method of the electromagnetic wave material supported by the FDTD electromagnetic field simulation technique is studied. First of all, a result of the dielectric measurement using the rectangular cavity resonator is shown, and the problem of the restriction to the material configuration is examined. Next, a measurement method of the metal surface resistance using a NRD guide resonator is proposed. Finally, the measurement method for the semiconductor wafers and dielectric plates is studied.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Micro- and millimeter-wave / Measurement method / Electromagnetic-wave-materials / Dielectric substrate / Semiconductor wafer / Conductor surface resistance
Paper # ED2006-221,MW2006-174
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Committee ED
Conference Date 2007/1/10(1days)
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Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A Study on Material Measurement Methods Using FDTD Simulation Techniques : Measurements of Surface Resistance of Metals and Dielectric Plates Including Semiconductor Wafer in Millimeter-wave Range
Sub Title (in English)
Keyword(1) Micro- and millimeter-wave
Keyword(2) Measurement method
Keyword(3) Electromagnetic-wave-materials
Keyword(4) Dielectric substrate
Keyword(5) Semiconductor wafer
Keyword(6) Conductor surface resistance
1st Author's Name Yukio IIDA
1st Author's Affiliation ORDIST, Faculty of Engineering, Kansai University()
2nd Author's Name Koichi NAKAO
2nd Author's Affiliation Faculty of Engineering, Kansai University
3rd Author's Name Yasuhisa OMURA
3rd Author's Affiliation ORDIST, Faculty of Engineering, Kansai University
4th Author's Name Susumu TAMURA
4th Author's Affiliation ORDIST, Faculty of Engineering, Kansai University
Date 2007-01-18
Paper # ED2006-221,MW2006-174
Volume (vol) vol.106
Number (no) 459
Page pp.pp.-
#Pages 6
Date of Issue