| Presentation | 2007-01-26 Fabrication Process for Nb-based Single Flux Quantum circuits Mutsuo HIDAKA, Shuichi NAGASAWA, Kenji HINODE, Tetsuro SATOH, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Current status and future prospect of Nb based single-flux-quantum (SFQ) circuit fabrication process in Superconductivity Research Laboratory (SRL) are described. SRL fabricates SFQ circuits using both Standard Process whose critical current density (J_c) is 2.5kA/cm^2 and Advanced process whose J_c is 10kA/cm^2. SFQ chips fabricated by the Standard Process are distributed to not only SRL but also its collaborators such as Nagoya University, Yokohama National University and NICT. Advanced Process showed that clock frequency of SFQ circuits can be scaled with their minimum feature sizes and advanced CMOS fabrication equipment can be introduced to the SFQ circuit fabrication process. We discussed integration level and clock frequency of future SFQ circuits. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Superconductor / Single-flux-quantum (SFQ) circuit / Niobium / Fabrication process |
| Paper # | SCE2006-37 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 2007/1/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication Process for Nb-based Single Flux Quantum circuits |
| Sub Title (in English) | |
| Keyword(1) | Superconductor |
| Keyword(2) | Single-flux-quantum (SFQ) circuit |
| Keyword(3) | Niobium |
| Keyword(4) | Fabrication process |
| 1st Author's Name | Mutsuo HIDAKA |
| 1st Author's Affiliation | Superconductor Research Laboratory() |
| 2nd Author's Name | Shuichi NAGASAWA |
| 2nd Author's Affiliation | Superconductor Research Laboratory |
| 3rd Author's Name | Kenji HINODE |
| 3rd Author's Affiliation | Superconductor Research Laboratory |
| 4th Author's Name | Tetsuro SATOH |
| 4th Author's Affiliation | Superconductor Research Laboratory |
| Date | 2007-01-26 |
| Paper # | SCE2006-37 |
| Volume (vol) | vol.106 |
| Number (no) | 503 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |