Presentation 2007/1/18
Synthesis of GaN-based multilayer particles by a vapor-phase method
Yuya OOGI, Tatsuhiro MORI, Hironori KOMODA, Hiroko KOMINAMI, Yoichiro NAKANISHI, Kazuhiko HARA,
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Abstract(in English) Multilayer particles consisting of GaN and AlN were synthesized by a vapor phase method. First, the AlN core particle was formed by using vaporized Al and N_2 gas as reactants. It was found that the crystallinity of AlN core particle depends on the temperature of the furnace, with the narrowest width of x-ray diffraction peak obtained at 1200℃. The GaN layer was formed on the surface of the AlN particle by using GaCl and NH_3. A spectrum characteristic of to GaN with the peak in 370nm was observed by the GaN/AlN bilayer particles. Finally, the AlN layer was formed on GaN layer by using AlCl and GaCl.
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Keyword(in English) multilayer particles / AlN / GaN / vapor-phase synthesis / X-ray diffraction / photoluminescence / cathodoluminescence
Paper # EID2006-48
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Committee EID
Conference Date 2007/1/18(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Synthesis of GaN-based multilayer particles by a vapor-phase method
Sub Title (in English)
Keyword(1) multilayer particles
Keyword(2) AlN
Keyword(3) GaN
Keyword(4) vapor-phase synthesis
Keyword(5) X-ray diffraction
Keyword(6) photoluminescence
Keyword(7) cathodoluminescence
1st Author's Name Yuya OOGI
1st Author's Affiliation Research Institute of Electronics, Shizuoka University()
2nd Author's Name Tatsuhiro MORI
2nd Author's Affiliation Research Institute of Electronics, Shizuoka University
3rd Author's Name Hironori KOMODA
3rd Author's Affiliation Research Institute of Electronics, Shizuoka University
4th Author's Name Hiroko KOMINAMI
4th Author's Affiliation Research Institute of Electronics, Shizuoka University
5th Author's Name Yoichiro NAKANISHI
5th Author's Affiliation Research Institute of Electronics, Shizuoka University
6th Author's Name Kazuhiko HARA
6th Author's Affiliation Research Institute of Electronics, Shizuoka University
Date 2007/1/18
Paper # EID2006-48
Volume (vol) vol.106
Number (no) 499
Page pp.pp.-
#Pages 4
Date of Issue