Presentation 2007-01-17
A study on electrical control of parameters of cantilever with laminated piezoelectric plates : reguration of elasticity and Q factor
TATSUYA Tomita, Kohei YAMASUE, Takashi HIKIHARA,
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Abstract(in English) Microfabricated cantilevers laminated with piezoelectric thin films (piezoelectric cantilevers) have been developed as probes of atomic force microscopes due to the capability of integrated deflection sensing and oscillation excitation. In this report, we propose parametric control of piezoelectric cantilevers, which allow us to control the quality factor and the elasticity using feedback. We also present the elasticity control without feedback based on the recently developed method by Date et al.. The proposed elasticity control methods enable the parametric resonance based operation presented by Moreno-Moreno et al..
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Keyword(in English) piezoelectric cantilever / parameter control / quality factor / elasticity / parametric excitation
Paper # NLP2006-118
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Committee NLP
Conference Date 2007/1/10(1days)
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Registration To Nonlinear Problems (NLP)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A study on electrical control of parameters of cantilever with laminated piezoelectric plates : reguration of elasticity and Q factor
Sub Title (in English)
Keyword(1) piezoelectric cantilever
Keyword(2) parameter control
Keyword(3) quality factor
Keyword(4) elasticity
Keyword(5) parametric excitation
1st Author's Name TATSUYA Tomita
1st Author's Affiliation Department of Electrical Engineering, Kyoto University()
2nd Author's Name Kohei YAMASUE
2nd Author's Affiliation Department of Electrical Engineering, Kyoto University
3rd Author's Name Takashi HIKIHARA
3rd Author's Affiliation Department of Electrical Engineering, Kyoto University
Date 2007-01-17
Paper # NLP2006-118
Volume (vol) vol.106
Number (no) 451
Page pp.pp.-
#Pages 6
Date of Issue