Presentation | 2007-01-17 A study on electrical control of parameters of cantilever with laminated piezoelectric plates : reguration of elasticity and Q factor TATSUYA Tomita, Kohei YAMASUE, Takashi HIKIHARA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Microfabricated cantilevers laminated with piezoelectric thin films (piezoelectric cantilevers) have been developed as probes of atomic force microscopes due to the capability of integrated deflection sensing and oscillation excitation. In this report, we propose parametric control of piezoelectric cantilevers, which allow us to control the quality factor and the elasticity using feedback. We also present the elasticity control without feedback based on the recently developed method by Date et al.. The proposed elasticity control methods enable the parametric resonance based operation presented by Moreno-Moreno et al.. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | piezoelectric cantilever / parameter control / quality factor / elasticity / parametric excitation |
Paper # | NLP2006-118 |
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Committee | NLP |
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Conference Date | 2007/1/10(1days) |
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Registration To | Nonlinear Problems (NLP) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | A study on electrical control of parameters of cantilever with laminated piezoelectric plates : reguration of elasticity and Q factor |
Sub Title (in English) | |
Keyword(1) | piezoelectric cantilever |
Keyword(2) | parameter control |
Keyword(3) | quality factor |
Keyword(4) | elasticity |
Keyword(5) | parametric excitation |
1st Author's Name | TATSUYA Tomita |
1st Author's Affiliation | Department of Electrical Engineering, Kyoto University() |
2nd Author's Name | Kohei YAMASUE |
2nd Author's Affiliation | Department of Electrical Engineering, Kyoto University |
3rd Author's Name | Takashi HIKIHARA |
3rd Author's Affiliation | Department of Electrical Engineering, Kyoto University |
Date | 2007-01-17 |
Paper # | NLP2006-118 |
Volume (vol) | vol.106 |
Number (no) | 451 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |