Presentation | 2007-01-19 Failure analysis system to classify failure modes using combination of FBMs Hitoshi Maeda, Fumihito Ohta, Michio Kuniya, Koji Fukumoto, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have developed the system to classify failure modes using combination of fail bit patterns appeared in same areas of fail bit maps (FBMs) obtained under different test conditions for a same sample. As a result, we can classify detailed failure modes with ease. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | fail bit map / test / failure analysis / failure mode |
Paper # | CPM2006-145,ICD2006-187 |
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Conference Information | |
Committee | ICD |
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Conference Date | 2007/1/11(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Integrated Circuits and Devices (ICD) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Failure analysis system to classify failure modes using combination of FBMs |
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Keyword(1) | fail bit map |
Keyword(2) | test |
Keyword(3) | failure analysis |
Keyword(4) | failure mode |
1st Author's Name | Hitoshi Maeda |
1st Author's Affiliation | Process Technology Development Division, Production and Technology Unit, Renesas Technology Corp.() |
2nd Author's Name | Fumihito Ohta |
2nd Author's Affiliation | Process Technology Development Division, Production and Technology Unit, Renesas Technology Corp. |
3rd Author's Name | Michio Kuniya |
3rd Author's Affiliation | Process Technology Development Division, Production and Technology Unit, Renesas Technology Corp. |
4th Author's Name | Koji Fukumoto |
4th Author's Affiliation | Process Technology Development Division, Production and Technology Unit, Renesas Technology Corp. |
Date | 2007-01-19 |
Paper # | CPM2006-145,ICD2006-187 |
Volume (vol) | vol.106 |
Number (no) | 468 |
Page | pp.pp.- |
#Pages | 6 |
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