| Presentation | 2006/12/1 Development of LSI failure analysis technique using Laser THz Emiison Microscope Masatsugu YAMASHITA, Chiko OTANI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We proposed and developed a laser THz emission microscope (LTEM) as a novel tool for inspecting electrical failures in semiconductor devices. LTEM provides an image reflecting the photocurrent distribution in LSI chip by scanning it with fs laser pulses. By comparing LTEM images of a normal chip and a damaged one, we observed the difference in the LTEM image near the damaged area. Here, we report the experimental result on non-biased MOSFETs embedded in a test element group. We found that the LTEM images of damaged samples changed from those of normal samples under non-biased condition. This indicates that the LTEM is a potential tool for inspecting electrical failures in circuits. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | THz wave / fs laser / LSI / failure analysis |
| Paper # | ED2006-191 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2006/12/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of LSI failure analysis technique using Laser THz Emiison Microscope |
| Sub Title (in English) | |
| Keyword(1) | THz wave |
| Keyword(2) | fs laser |
| Keyword(3) | LSI |
| Keyword(4) | failure analysis |
| 1st Author's Name | Masatsugu YAMASHITA |
| 1st Author's Affiliation | RIKEN() |
| 2nd Author's Name | Chiko OTANI |
| 2nd Author's Affiliation | RIKEN |
| Date | 2006/12/1 |
| Paper # | ED2006-191 |
| Volume (vol) | vol.106 |
| Number (no) | 403 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |