Presentation 2006/12/1
Fabrication of hot electron transistor controlled by insulated gate
Akira SUWA, Takashi HASEGAWA, Takahiro HINO, Yasuyuki MIYAMOTO, Kazuhito FURUYA,
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Abstract(in English) The base layer of a conventional hot electron transistor was eliminated to minimize the scattering. In previous trial, electron emission from the emitter was controlled by positively biased Schottky gate electrodes located both sides of the emitter mesa and low current density and gate leakage current were observed. To solve such problems, we fabricated hot electron transistor controlled by insulated gate. Collector current modulation by gate bias was observed at room temperature. The current density was 160kA/cm^2 and the thermionic emission injected from the collector to the gate was suppressed.
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Keyword(in English) hot electron transistor / electron beam lithography / insulated gate
Paper # ED2006-186
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Committee ED
Conference Date 2006/12/1(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of hot electron transistor controlled by insulated gate
Sub Title (in English)
Keyword(1) hot electron transistor
Keyword(2) electron beam lithography
Keyword(3) insulated gate
1st Author's Name Akira SUWA
1st Author's Affiliation Physical Electron. Tokyo Institute of Technology()
2nd Author's Name Takashi HASEGAWA
2nd Author's Affiliation Physical Electron. Tokyo Institute of Technology
3rd Author's Name Takahiro HINO
3rd Author's Affiliation Physical Electron. Tokyo Institute of Technology
4th Author's Name Yasuyuki MIYAMOTO
4th Author's Affiliation Physical Electron. Tokyo Institute of Technology:JST-CREST
5th Author's Name Kazuhito FURUYA
5th Author's Affiliation Physical Electron. Tokyo Institute of Technology:JST-CREST
Date 2006/12/1
Paper # ED2006-186
Volume (vol) vol.106
Number (no) 403
Page pp.pp.-
#Pages 5
Date of Issue