Presentation 2006/12/1
Research and Development of Millimeter-Wave GaN Transistors
Masataka HIGASHIWAKI, Takashi MIMURA, Toshiaki MATSUI,
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Abstract(in English) GaN heterostructure field-effect transistors (HFETs) are promising not only as high-power and high-breakdown-voltage devices but also as high-frequency ones, because the saturation electron velocity in GaN is relatively high. By using three characteristic techniques to improve high-frequency characteristics of GaN HFETs, which are (1) high-Al-composition and extremely thin barrier layers, (2) Cat-CVD SiN passivation, and (3) T-shaped short gates defined by electron-beam lithography, we have succeeded in suppressing short-channel effects in short-gate HFETs with a gate length of less than 0.1μm. Here, we report on device characteristics of short-gate AlGaN/GaN and InAlN/GaN HFETs, which are being developed for applications in the frequency range above 50GHz.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) AlGaN/GaN / InAlN/GaN / heterostructure field-effect transistors (HFETs) / catalytic chemical vapor deposition (Cat-CVD) / millimeter-wave
Paper # ED2006-184
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Committee ED
Conference Date 2006/12/1(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Research and Development of Millimeter-Wave GaN Transistors
Sub Title (in English)
Keyword(1) AlGaN/GaN
Keyword(2) InAlN/GaN
Keyword(3) heterostructure field-effect transistors (HFETs)
Keyword(4) catalytic chemical vapor deposition (Cat-CVD)
Keyword(5) millimeter-wave
1st Author's Name Masataka HIGASHIWAKI
1st Author's Affiliation National Institute of Information and Communications Technology (NICT)()
2nd Author's Name Takashi MIMURA
2nd Author's Affiliation National Institute of Information and Communications Technology (NICT):Fujitsu Laboratories Ltd.
3rd Author's Name Toshiaki MATSUI
3rd Author's Affiliation National Institute of Information and Communications Technology (NICT)
Date 2006/12/1
Paper # ED2006-184
Volume (vol) vol.106
Number (no) 403
Page pp.pp.-
#Pages 6
Date of Issue