| Presentation | 2006-11-24 Fabrication of iron silicides photonic crystals Shunsuke KUNIMATSU, Akifumi IMAI, Kensuke AKIYAMA, Yoshihito MAEDA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | There are some iron silicides with semiconducting, ferromagnetic and metallic properties. β-FeSi_2 with a high refractive index of more than 5.2 has been expected application to high contrast photonic crystals. However, the etching rate of β-FeSi_2 film is too low to obtain the sufficient etching selectivity against metal masks employed in lift-off processes. In this study, we have improved both the etching rate and the selectivity by dry etching processes using magnetic neutral loop discharge plasma at low pressure. We have succeeded in fabricating β-FeSi_2 photonic crystals. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Semiconducting silicide / Reactive ion etching / Photonic crystal / β-FeSi_2 |
| Paper # | R2006-32,ED2006-177,SDM2006-195 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2006/11/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of iron silicides photonic crystals |
| Sub Title (in English) | |
| Keyword(1) | Semiconducting silicide |
| Keyword(2) | Reactive ion etching |
| Keyword(3) | Photonic crystal |
| Keyword(4) | β-FeSi_2 |
| 1st Author's Name | Shunsuke KUNIMATSU |
| 1st Author's Affiliation | Department of Energy Science and Technology, Kyoto University() |
| 2nd Author's Name | Akifumi IMAI |
| 2nd Author's Affiliation | Department of Energy Science and Technology, Kyoto University |
| 3rd Author's Name | Kensuke AKIYAMA |
| 3rd Author's Affiliation | Kanagawa Industrial Technology Center |
| 4th Author's Name | Yoshihito MAEDA |
| 4th Author's Affiliation | Department of Energy Science and Technology, Kyoto University |
| Date | 2006-11-24 |
| Paper # | R2006-32,ED2006-177,SDM2006-195 |
| Volume (vol) | vol.106 |
| Number (no) | 379 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |