| Presentation | 2006-11-10 Effect of Surface Roughness of Substrate on Structure and Temperature Coefficient of Resistance (TCR) of NiCr Films Deposited by Sputtering Satoshi IWATSUBO, Takaaki SHIMIZU, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | NiCr films on Al_2O_3 substrates with various rough surfaces were deposited by RF magnetron sputtering (RFMS) and ion-beam sputtering (IBS) as a parameter of film thickness t_F. The t_F dependence of the structure and the temperature coefficient of resistance (TCR) of the films was investigated. The values of thermal strain λ_T owing to roughness of the films were estimated by FEM simulation. It was found that the roughness of the substrates caused the changes in the film structure, λ_T and the film thickness, so that the value of TCR of the NiCr films was decreased on a large scale. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Temperature Coefficient of Resistance (TCR) / NiCr / thin film / sputtering / electrical properties / surface roughness |
| Paper # | CPM2006-128 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2006/11/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect of Surface Roughness of Substrate on Structure and Temperature Coefficient of Resistance (TCR) of NiCr Films Deposited by Sputtering |
| Sub Title (in English) | |
| Keyword(1) | Temperature Coefficient of Resistance (TCR) |
| Keyword(2) | NiCr |
| Keyword(3) | thin film |
| Keyword(4) | sputtering |
| Keyword(5) | electrical properties |
| Keyword(6) | surface roughness |
| 1st Author's Name | Satoshi IWATSUBO |
| 1st Author's Affiliation | Toyama Industrial Technology Center() |
| 2nd Author's Name | Takaaki SHIMIZU |
| 2nd Author's Affiliation | Toyama Industrial Technology Center |
| Date | 2006-11-10 |
| Paper # | CPM2006-128 |
| Volume (vol) | vol.106 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |