Presentation 2006-11-10
The practical sputtering system for oxide films by oxygen ion implantation
Shinobu CHIBA, Kimihiro SASAKI, Akira MOTOKI, Tomonobu HATA, Akihiko ITO,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) We have developed the practical system to produce oxide films by oxygen ion implantation. This system is deposited oxide films at high rate by dividing into two regions; metal sputtering region and oxidization region. This is the large-sized system of the carousel type, and oxide films were deposited uniformly in effective deposition area by optimization of the film thickness distribution and the refractive index distribution. The distribution of refractive index and film thickness were shown to be ±1.05% and ±1.47%, respectively.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) oxygen ion implantation / oxide films / high rate deposition / film thickness distribution
Paper # CPM2006-127
Date of Issue

Conference Information
Committee CPM
Conference Date 2006/11/2(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair
Vice Chair
Secretary
Assistant

Paper Information
Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The practical sputtering system for oxide films by oxygen ion implantation
Sub Title (in English)
Keyword(1) oxygen ion implantation
Keyword(2) oxide films
Keyword(3) high rate deposition
Keyword(4) film thickness distribution
1st Author's Name Shinobu CHIBA
1st Author's Affiliation Graduate School of Natural & Technology Kanazawa University:CBC Co., Ltd.()
2nd Author's Name Kimihiro SASAKI
2nd Author's Affiliation Graduate School of Natural & Technology Kanazawa University
3rd Author's Name Akira MOTOKI
3rd Author's Affiliation CBC Co., Ltd.
4th Author's Name Tomonobu HATA
4th Author's Affiliation JST Innovation Plaza Ishikawa
5th Author's Name Akihiko ITO
5th Author's Affiliation SHIBAURA MECHATRONICS Co., Ltd.
Date 2006-11-10
Paper # CPM2006-127
Volume (vol) vol.106
Number (no) 336
Page pp.pp.-
#Pages 6
Date of Issue