| Presentation | 2006-11-10 The practical sputtering system for oxide films by oxygen ion implantation Shinobu CHIBA, Kimihiro SASAKI, Akira MOTOKI, Tomonobu HATA, Akihiko ITO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed the practical system to produce oxide films by oxygen ion implantation. This system is deposited oxide films at high rate by dividing into two regions; metal sputtering region and oxidization region. This is the large-sized system of the carousel type, and oxide films were deposited uniformly in effective deposition area by optimization of the film thickness distribution and the refractive index distribution. The distribution of refractive index and film thickness were shown to be ±1.05% and ±1.47%, respectively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | oxygen ion implantation / oxide films / high rate deposition / film thickness distribution |
| Paper # | CPM2006-127 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2006/11/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The practical sputtering system for oxide films by oxygen ion implantation |
| Sub Title (in English) | |
| Keyword(1) | oxygen ion implantation |
| Keyword(2) | oxide films |
| Keyword(3) | high rate deposition |
| Keyword(4) | film thickness distribution |
| 1st Author's Name | Shinobu CHIBA |
| 1st Author's Affiliation | Graduate School of Natural & Technology Kanazawa University:CBC Co., Ltd.() |
| 2nd Author's Name | Kimihiro SASAKI |
| 2nd Author's Affiliation | Graduate School of Natural & Technology Kanazawa University |
| 3rd Author's Name | Akira MOTOKI |
| 3rd Author's Affiliation | CBC Co., Ltd. |
| 4th Author's Name | Tomonobu HATA |
| 4th Author's Affiliation | JST Innovation Plaza Ishikawa |
| 5th Author's Name | Akihiko ITO |
| 5th Author's Affiliation | SHIBAURA MECHATRONICS Co., Ltd. |
| Date | 2006-11-10 |
| Paper # | CPM2006-127 |
| Volume (vol) | vol.106 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |