| Presentation | 2006-11-10 Growth Delay Time on fabricating thin ZrO_2 film by Limited Reaction Sputtering Hidetaka SUGIYAMA, Nobuo KOJIMA, Taro YAMAGISHI, YING Zhou, Kimihiro SASAKI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We are researching a growth mechanism of thin ZrO_2 films as a high permittivity gate insulation film which is substitute of the SiO_2 film. When we fabricate ZrO_2 with the growth temperature of 300℃ by Limited Reaction Sputtering, a method which can fabricate oxide film by using metal target, we figured out that in spite of having started deposition, there is a period which is not observed as a film thickness. We also found that a film grows proportional to deposition time after the growth delay time. This phenomenon is unique to our experimental equipment and also this phenomenon is highly reproducible and a certain mechanism about a surface reaction and film growth may be exists. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Limited Reaction Sputtering / ZrO_2 / Deposition Rate / Growth Delay Time |
| Paper # | CPM2006-126 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2006/11/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth Delay Time on fabricating thin ZrO_2 film by Limited Reaction Sputtering |
| Sub Title (in English) | |
| Keyword(1) | Limited Reaction Sputtering |
| Keyword(2) | ZrO_2 |
| Keyword(3) | Deposition Rate |
| Keyword(4) | Growth Delay Time |
| 1st Author's Name | Hidetaka SUGIYAMA |
| 1st Author's Affiliation | Graduate school of Natural Science & Technology, Kanazawa University() |
| 2nd Author's Name | Nobuo KOJIMA |
| 2nd Author's Affiliation | Graduate school of Natural Science & Technology, Kanazawa University |
| 3rd Author's Name | Taro YAMAGISHI |
| 3rd Author's Affiliation | Faculty of Engineering, Kanazawa University |
| 4th Author's Name | YING Zhou |
| 4th Author's Affiliation | Graduate school of Natural Science & Technology, Kanazawa University |
| 5th Author's Name | Kimihiro SASAKI |
| 5th Author's Affiliation | Graduate school of Natural Science & Technology, Kanazawa University |
| Date | 2006-11-10 |
| Paper # | CPM2006-126 |
| Volume (vol) | vol.106 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |