| Presentation | 2006-11-10 Deterioration of MOVPE InN during the growth Kenichi SUGITA, Yoshinori HOUCHIN, Akihiro HASHIMOTO, Akio YAMAMOTO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We confirmed the deterioration of MOVPE InN during the growth. In this result, deterioration of InN is observed when the growth temperature exceeds 600℃. And the deterioration is observed when the growth time increase. Especially it is noted that the deterioration occurs not at the front surface but near the interface. Since the twist angle distribution is scarcely changed by the increase in thickness or the increase in growth temperature, the crystallographic destruction of InN crystals during growth and annealing is concluded to be anisotropic. So the cause of deterioration is not only heat. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | InN / deterioration / MOVPE / PL / tilt / twist |
| Paper # | CPM2006-125 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2006/11/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Deterioration of MOVPE InN during the growth |
| Sub Title (in English) | |
| Keyword(1) | InN |
| Keyword(2) | deterioration |
| Keyword(3) | MOVPE |
| Keyword(4) | PL |
| Keyword(5) | tilt |
| Keyword(6) | twist |
| 1st Author's Name | Kenichi SUGITA |
| 1st Author's Affiliation | Department of Electrical and Electronics Eng., Faculty of Engineering, University of Fukui() |
| 2nd Author's Name | Yoshinori HOUCHIN |
| 2nd Author's Affiliation | Department of Electrical and Electronics Eng., Faculty of Engineering, University of Fukui |
| 3rd Author's Name | Akihiro HASHIMOTO |
| 3rd Author's Affiliation | Department of Electrical and Electronics Eng., Faculty of Engineering, University of Fukui |
| 4th Author's Name | Akio YAMAMOTO |
| 4th Author's Affiliation | Department of Electrical and Electronics Eng., Faculty of Engineering, University of Fukui |
| Date | 2006-11-10 |
| Paper # | CPM2006-125 |
| Volume (vol) | vol.106 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |