Presentation | 2006-11-10 Thermoelectric performance of deteriorated SiGe thin films : influence from substrate Akinari MATOBA, Toshio HAYAHIRA, Takahiro TSUDUKI, Kimihiro SASAKI, Youichi OKAMOTO, Jun MORIOTO, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We found that SiGe thin films on Si substrate prepared by Ion-Beam Sputtering (IBS) technique showed thermoelectric performance as high as 4.5×10^<-2>Wm^<-1>K^<-2>. However the resistivity of SiGe thin film, which is one of the performance components, may be influenced by the substrate. Whereas, by changing the resistivity of the substrate, we confirmed that resistivity of SiGe was not influenced by the substrate. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Seebeck effect / Ion-beam sputtering / SiGe / SOI |
Paper # | CPM2006-123 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2006/11/2(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Thermoelectric performance of deteriorated SiGe thin films : influence from substrate |
Sub Title (in English) | |
Keyword(1) | Seebeck effect |
Keyword(2) | Ion-beam sputtering |
Keyword(3) | SiGe |
Keyword(4) | SOI |
1st Author's Name | Akinari MATOBA |
1st Author's Affiliation | Kanazawa University() |
2nd Author's Name | Toshio HAYAHIRA |
2nd Author's Affiliation | Kanazawa University |
3rd Author's Name | Takahiro TSUDUKI |
3rd Author's Affiliation | Kanazawa University |
4th Author's Name | Kimihiro SASAKI |
4th Author's Affiliation | Kanazawa University |
5th Author's Name | Youichi OKAMOTO |
5th Author's Affiliation | National Defense Academy |
6th Author's Name | Jun MORIOTO |
6th Author's Affiliation | National Defense Academy |
Date | 2006-11-10 |
Paper # | CPM2006-123 |
Volume (vol) | vol.106 |
Number (no) | 336 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |