Presentation 2006-11-09
Cathodo-Luminescence study of AlInN films grown by RF-MBE
Yu Mimura, Wataru Terashima, Song-Bek Che, Yoshihiro Ishitani, Akihiko Yoshikawa,
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Abstract(in English) Recently InN-based III-nitride semiconductors have attracted much attention as a promising material system for photonic devices operating in optical communication wavelength. Up to now, we have studied on the growth of AlInN ternary alloys and investigated on their structural and optical properties. It was found that the AlInN ternary alloys in the mid-composition tend to have a poor crystallinity because of the phase separation arising from the large immiscibility between InN and AlN. In this report, we investigated on the detailed crystalline and optical properties of AlInN ternary alloys in the mid-composition grown by RF-MBE using CL measurements. The AlInN films grown at higher temperatures have the CL spectra indicating their poor crystallinity. On the other hand, the AlInN films grown at lower temperatures have the CL spectra those peek is lower in energy than their bandgaps in spite of their crystalline uniformity. This broadening of the CL spectra attributed to the effects of point defects at the boundary of three-dimensional islands.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) InN / AlInN ternary alloys / RF-MBE / Cathodo-luminescence
Paper # CPM2006-117
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Conference Information
Committee CPM
Conference Date 2006/11/2(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Cathodo-Luminescence study of AlInN films grown by RF-MBE
Sub Title (in English)
Keyword(1) InN
Keyword(2) AlInN ternary alloys
Keyword(3) RF-MBE
Keyword(4) Cathodo-luminescence
1st Author's Name Yu Mimura
1st Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University()
2nd Author's Name Wataru Terashima
2nd Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University
3rd Author's Name Song-Bek Che
3rd Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University:InN-Project as a CREST-program of JST, Chiba University
4th Author's Name Yoshihiro Ishitani
4th Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University:InN-Project as a CREST-program of JST, Chiba University
5th Author's Name Akihiko Yoshikawa
5th Author's Affiliation Department of Electronics and Mechanical Engineering, Chiba University:InN-Project as a CREST-program of JST, Chiba University
Date 2006-11-09
Paper # CPM2006-117
Volume (vol) vol.106
Number (no) 336
Page pp.pp.-
#Pages 6
Date of Issue