| Presentation | 2006-11-09 Growth Control of Carbon Nanotubes on Ni/Mo Bilayer Hiroki OKUYAMA, Nobuyuki IWATA, Hiroshi YAMAMOTO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We tried to control position, growth direction, diameter and density of carbon nanotubes (CNTs) aiming for nanoscaled electronic device applications. The CNTs were grown from patterned Ni catalyst/Mo underlayer. The CNTs grew selectively at the edges of the patterned metal by using thermal CVD. The vertically aligned CNTs were prepared by using plasma enhanced CVD. Diameter of the CNTs was controlled by varying Ni catalyst thickness. Density of the CNTs was controlled by varying plasma pre-treatment time. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Carbon nanotube / Growth control / Thermal chemical vapor deposition / Plasma enhanced chemical vapor deposition / Ni catalyst / Mo underlayer |
| Paper # | CPM2006-116 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2006/11/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth Control of Carbon Nanotubes on Ni/Mo Bilayer |
| Sub Title (in English) | |
| Keyword(1) | Carbon nanotube |
| Keyword(2) | Growth control |
| Keyword(3) | Thermal chemical vapor deposition |
| Keyword(4) | Plasma enhanced chemical vapor deposition |
| Keyword(5) | Ni catalyst |
| Keyword(6) | Mo underlayer |
| 1st Author's Name | Hiroki OKUYAMA |
| 1st Author's Affiliation | College of Science and Technology, Nihon University() |
| 2nd Author's Name | Nobuyuki IWATA |
| 2nd Author's Affiliation | College of Science and Technology, Nihon University |
| 3rd Author's Name | Hiroshi YAMAMOTO |
| 3rd Author's Affiliation | College of Science and Technology, Nihon University |
| Date | 2006-11-09 |
| Paper # | CPM2006-116 |
| Volume (vol) | vol.106 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |