Presentation 2006-11-09
Preparation of ITO Thin Films on Plastic Substrate
Masaki TAKEUCHI, Kazuya MORISHITA, Takeshi UMETSU, Yusuke NAKATA, Shinsuke MIYAZAKI, Hidehiko SHIMIZU, Takeo MARUYAMA, Haruo IWANO, Takahiro KAWAKAMI, Yoichi HOSHI, Masahiro MINAGAWA,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) In order to examine deposition method of the ITO films at the low-temperature, deposition of the ITO films on plastic (PEN) and glass substrate was attempted by RF-DC coupled magnetron sputtering (RF-DC MS) method. As a result, ITO films on PEN and glass substrate deposited by the RF-DC MS method obtained at temperature below 50℃. ITO films deposited by the RF-DC MS method were amorphous and those films had resistivity of about 5×10^<-4>Ω・cm and transmittance above 80% in the visible range.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) ITO thin film / RF-DC coupled magnetron sputtering method / low temperature deposition / amorphous
Paper # CPM2006-114
Date of Issue

Conference Information
Committee CPM
Conference Date 2006/11/2(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Preparation of ITO Thin Films on Plastic Substrate
Sub Title (in English)
Keyword(1) ITO thin film
Keyword(2) RF-DC coupled magnetron sputtering method
Keyword(3) low temperature deposition
Keyword(4) amorphous
1st Author's Name Masaki TAKEUCHI
1st Author's Affiliation Guraduate School of Science and Technology, Niigata University()
2nd Author's Name Kazuya MORISHITA
2nd Author's Affiliation Guraduate School of Science and Technology, Niigata University
3rd Author's Name Takeshi UMETSU
3rd Author's Affiliation Guraduate School of Science and Technology, Niigata University
4th Author's Name Yusuke NAKATA
4th Author's Affiliation Guraduate School of Science and Technology, Niigata University
5th Author's Name Shinsuke MIYAZAKI
5th Author's Affiliation Guraduate School of Science and Technology, Niigata University
6th Author's Name Hidehiko SHIMIZU
6th Author's Affiliation Faculty of Engineering, Niigata University:Center for Transdisciplinary Research, Niigata University
7th Author's Name Takeo MARUYAMA
7th Author's Affiliation Faculty of Engineering, Niigata University
8th Author's Name Haruo IWANO
8th Author's Affiliation Faculty of Engineering, Niigata University
9th Author's Name Takahiro KAWAKAMI
9th Author's Affiliation Faculty of Engineering, Niigata University
10th Author's Name Yoichi HOSHI
10th Author's Affiliation Faculty of Engineering, Tokyo Polytechnics University
11th Author's Name Masahiro MINAGAWA
11th Author's Affiliation Nippon Seiki Co., Ltd
Date 2006-11-09
Paper # CPM2006-114
Volume (vol) vol.106
Number (no) 336
Page pp.pp.-
#Pages 5
Date of Issue