Presentation | 2006-11-09 Preparation of ITO Thin Films on Plastic Substrate Masaki TAKEUCHI, Kazuya MORISHITA, Takeshi UMETSU, Yusuke NAKATA, Shinsuke MIYAZAKI, Hidehiko SHIMIZU, Takeo MARUYAMA, Haruo IWANO, Takahiro KAWAKAMI, Yoichi HOSHI, Masahiro MINAGAWA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | In order to examine deposition method of the ITO films at the low-temperature, deposition of the ITO films on plastic (PEN) and glass substrate was attempted by RF-DC coupled magnetron sputtering (RF-DC MS) method. As a result, ITO films on PEN and glass substrate deposited by the RF-DC MS method obtained at temperature below 50℃. ITO films deposited by the RF-DC MS method were amorphous and those films had resistivity of about 5×10^<-4>Ω・cm and transmittance above 80% in the visible range. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | ITO thin film / RF-DC coupled magnetron sputtering method / low temperature deposition / amorphous |
Paper # | CPM2006-114 |
Date of Issue |
Conference Information | |
Committee | CPM |
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Conference Date | 2006/11/2(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Preparation of ITO Thin Films on Plastic Substrate |
Sub Title (in English) | |
Keyword(1) | ITO thin film |
Keyword(2) | RF-DC coupled magnetron sputtering method |
Keyword(3) | low temperature deposition |
Keyword(4) | amorphous |
1st Author's Name | Masaki TAKEUCHI |
1st Author's Affiliation | Guraduate School of Science and Technology, Niigata University() |
2nd Author's Name | Kazuya MORISHITA |
2nd Author's Affiliation | Guraduate School of Science and Technology, Niigata University |
3rd Author's Name | Takeshi UMETSU |
3rd Author's Affiliation | Guraduate School of Science and Technology, Niigata University |
4th Author's Name | Yusuke NAKATA |
4th Author's Affiliation | Guraduate School of Science and Technology, Niigata University |
5th Author's Name | Shinsuke MIYAZAKI |
5th Author's Affiliation | Guraduate School of Science and Technology, Niigata University |
6th Author's Name | Hidehiko SHIMIZU |
6th Author's Affiliation | Faculty of Engineering, Niigata University:Center for Transdisciplinary Research, Niigata University |
7th Author's Name | Takeo MARUYAMA |
7th Author's Affiliation | Faculty of Engineering, Niigata University |
8th Author's Name | Haruo IWANO |
8th Author's Affiliation | Faculty of Engineering, Niigata University |
9th Author's Name | Takahiro KAWAKAMI |
9th Author's Affiliation | Faculty of Engineering, Niigata University |
10th Author's Name | Yoichi HOSHI |
10th Author's Affiliation | Faculty of Engineering, Tokyo Polytechnics University |
11th Author's Name | Masahiro MINAGAWA |
11th Author's Affiliation | Nippon Seiki Co., Ltd |
Date | 2006-11-09 |
Paper # | CPM2006-114 |
Volume (vol) | vol.106 |
Number (no) | 336 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |