| Presentation | 2006-11-09 Preparation of AZO Thin Films by Sputtering Method Ayumu KAWAKAMI, Toru NOGUCHI, Akiyuki HIGASHIDE, Shinsuke MIYAZAKI, Hidehiko SHIMIZU, Takeo MARUYAMA, Haruo IWANO, Tkahiro KAWAKAMI, Yoichi HOSHI, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | deposition of aluminum doped zinc oxide (AZO) thin films was attempted by magnetron sputtering (MS) method and sputter-beam deposition (SBD) method. As a result, the films deposited by the SBD method had c-axis orientation and good crystallinity compared with the films deposited by the MS method. In addition, the film deposited by the SBD method has much smoother surface than the film deposited by the MS method. Thin films deposited by SBD method had surface roughness (Ra) below 1nm and transmittance above 80% in the visible range. Therefore, it became clear that SBD method was a very useful technique for obtaining AZO films with good crystallinity and smooth surface. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AZO thin film / Sputter-Beam Deposition Method / crystallinity / surface roughness of the film |
| Paper # | CPM2006-113 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2006/11/2(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of AZO Thin Films by Sputtering Method |
| Sub Title (in English) | |
| Keyword(1) | AZO thin film |
| Keyword(2) | Sputter-Beam Deposition Method |
| Keyword(3) | crystallinity |
| Keyword(4) | surface roughness of the film |
| 1st Author's Name | Ayumu KAWAKAMI |
| 1st Author's Affiliation | Guraduate School of Science and Technology, Niigata University() |
| 2nd Author's Name | Toru NOGUCHI |
| 2nd Author's Affiliation | Guraduate School of Science and Technology, Niigata University |
| 3rd Author's Name | Akiyuki HIGASHIDE |
| 3rd Author's Affiliation | Guraduate School of Science and Technology, Niigata University |
| 4th Author's Name | Shinsuke MIYAZAKI |
| 4th Author's Affiliation | Guraduate School of Science and Technology, Niigata University |
| 5th Author's Name | Hidehiko SHIMIZU |
| 5th Author's Affiliation | Faculty of Engineering, Niigata University:Center for Transdisciplinary Research, Niigata University |
| 6th Author's Name | Takeo MARUYAMA |
| 6th Author's Affiliation | Faculty of Engineering, Niigata University |
| 7th Author's Name | Haruo IWANO |
| 7th Author's Affiliation | Faculty of Engineering, Niigata University |
| 8th Author's Name | Tkahiro KAWAKAMI |
| 8th Author's Affiliation | Faculty of Engineering, Niigata University |
| 9th Author's Name | Yoichi HOSHI |
| 9th Author's Affiliation | Faculty of Engineering, Tokyo Polytechnics University |
| Date | 2006-11-09 |
| Paper # | CPM2006-113 |
| Volume (vol) | vol.106 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |